硅基混合集成激光器的实验研究

发布时间：2019-03-23 17:09

【摘要】：单片集成度的日益提高,使得光互连技术在未来的集成光学发展中扮演的作用越来越大。在大数据、云计算等新技术层出不穷的时代,高速、大容量的信息传递需求带动了超高速器件的发展,硅基光电集成技术具有的低损耗、高带宽、低成本和成熟的CMOS工艺兼容性等优势,成为了主要的研究热点。在片上光互连技术和硅基光电子技术不断更新的背景下,利用有源发光介质与硅基波导器件相集成制备片上混合光源,对片上全光通信和片上光子器件互连集成有着十分重要的意义。本文基于SOI波导谐振腔结构,利用III-V族半导体放大器(SOA)与硅基波导谐振腔构成硅基激光器,开展了硅基混合集成激光器的实验研究。完成测试谐振腔反射谱和激光谱测试系统的搭建,用于对不同器件的反射率、带宽和输出功率进行测量,还搭建了低相干模式检测系统用于检测双环内部模式分布。本学位论文的主要内容如下:1.介绍了激光激射的工作原理,谐振腔内部模场分布,分析了微环谐振腔的滤波特性,从理论上构建了微环谐振腔的设计模型,为后续微环器件的制作与实验的提供了理论依据。2.实验测试和分析了几种硅基微环反射腔,实现了高反射率,低插入损耗的硅基反射腔镜,激光输出功率最高可达6.1mW,消光比在30dB以上。3.实验研究了双环反射腔镜的模式特性,实现了输出模式可选择的激光器,并通过低相干检测系统分析了双环结构的内部模场与波长分裂特性。4.进行了 SOA与硅基反射腔镜端面集成的初步实验研究,采用金属键合方式制作了硅基混合的有源芯片,通过对接耦合方式与无源波导的进行了光路对准,测得了四种微环谐振腔的滤波谱线,并对下一步的完善实验提出了改进方案。
[Abstract]:With the increasing of monolithic integration, optical interconnection technology plays a more and more important role in the development of integrated optics in the future. In the era of big data, cloud computing and other new technologies, high-speed, large-capacity information transmission needs have driven the development of ultra-high-speed devices, silicon-based optoelectronic integration technology has low loss, high bandwidth, The advantages of low cost and mature CMOS process compatibility have become the main research focus. Under the background of continuous updating of on-chip optical interconnection technology and silicon-based photoelectron technology, an on-chip hybrid light source is fabricated by integrating active light-emitting medium with silicon-based waveguide devices. It is very important to integrate all-on-chip optical communication and on-chip photonic device interconnection. In this paper, based on the structure of SOI waveguide resonator, a silicon-based laser is constructed by using III- V semiconductor amplifier (SOA) and silicon-based waveguide resonator, and the experimental study of Si-based hybrid integrated laser is carried out. In order to measure the reflectivity, bandwidth and output power of different devices, a low coherent mode detection system is built to detect the internal mode distribution of the double-loop, which can be used to measure the reflectivity, bandwidth and output power of different devices. The main contents of this dissertation are as follows: 1. This paper introduces the principle of laser excitation, the distribution of internal mode field in the cavity, analyzes the filtering characteristics of the micro-ring resonator, and constructs the design model of the micro-ring resonator theoretically. It provides a theoretical basis for the fabrication and experiment of subsequent microring devices. 2. Several kinds of Si-based micro-ring reflectors have been experimentally tested and analyzed, and the mirror with high reflectivity and low insertion loss has been realized. The laser output power can reach 6.1 MW and the extinction ratio is above 30dB. 3. The mode characteristics of dual ring reflectometry are studied experimentally and the output mode selectable laser is realized. The internal mode field and wavelength splitting characteristics of the dual loop structure are analyzed by low coherence detection system. 4. A preliminary experimental study on the integration of SOA and silicon-based reflector is carried out. A silicon-based hybrid active chip is fabricated by metal bonding, and the optical alignment between the passive waveguide and the coupling mode is carried out. The filtering spectral lines of four kinds of micro-ring resonators are measured, and an improved scheme for the next step of the experiment is put forward.
【学位授予单位】：浙江大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN248

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