自组装光纤光栅微尺度传感器关键技术研究

发布时间：2019-03-24 14:41

【摘要】：随着现代加工工业及精密制造业的快速发展,高端仪器设备制造领域对于具有微尺细结构的新型微器件需求广泛,而现有检测技术手段无法直接有效对该类微器件进行评价,严重制约了微细结构的加工及相关技术领域的发展。目前,随着探针传感器技术的不断发展,多芯光纤探针传感器凭借其三维解耦与测量的优点,通过配合三坐标测量机常用于微尺度测量。但是多芯光纤探针传感器存在探针内信号串扰、信号解调效率低及传感器制作成本高等问题。本论文针对上述问题,提出一种用于微尺度测量的自组装光纤光栅微尺度传感器及其功率解调系统,该微尺度传感器采用普通单模光纤光栅利用自组装原理进行封装制作,降低传感器制作成本并有效克服信号串扰问题,解决现有探针传感器制作成本高昂及探针内信号串扰的问题,同时针对该微尺度传感器设计了信号高速解调系统,实现对传感器输出信号的快速解调。本文对光纤光栅探针自组装原理、传感器封装制作、信号解调及测量系统设计进行了详细研究,最后实验测试了自组装光纤光栅微尺度传感器的性能。论文的主要研究内容如下:1.自组装光纤光栅微尺度传感器封装研究。提出一种利用自组装原理制作多芯光栅探针传感器的方法,解决现有多芯光纤光栅探针传感器存在成本高、信号串扰及传输损耗的问题。建立光纤光栅自组装模型,对其自组装原理进行研究,验证单模光纤在液桥力作用自组装形成多芯光纤的可行性;并封装制作自组装光纤光栅探针传感器。2.光功率解调系统设计。设计基于差动补偿原理的光功率解调系统,实现对探针传感器两路输出信号的快速解调,将解调效率提高10倍。设计新的参考光栅预应力调整装置,解决空气扰动及机械振动等问题,将一分钟稳定性从原有的0.25%提高到0.07%,并测试得到光功率解调电路板的功率分辨率为7 p W。3.自组装光纤光栅探针测量系统设计。针对自组装光纤光栅探针微尺度测量需求,对测量框架的机械结构进行优化;并编写自组装光纤光栅探针测量软件,通过压电陶瓷控制、电机驱动器控制及串口通讯子程序,实现探针姿态自动调整及微尺度自动测量的功能。4.自组装光纤光栅微尺度测量系统测试实验:在设计的微尺度测量系统上,对测量系统及测量软件的姿态调整功能进行验证,结果显示探针姿态实现自动调整;然后对探针测量系统性能进行了测试:实验验证了该传感器具有正交解耦能力,且传感组触测灵敏度为非传感组的100倍,得到系统的一分钟稳定性为30 nm,10分钟稳定性为60 nm。测量系统径向分辨力30 nm,轴向分辨力为10 nm。系统重复性为90 nm。最后对发动机上的微孔进行测量,得到微孔直径为282.8μm,k=2时测量结果的扩展不确定度为0.4μm。本文通过对光纤光栅微尺度传感器自组装原理的研究及传感器的封装制作,解决了现有多芯光纤光栅探针传感器在微尺度测量时存在的问题,为微尺度测量提供了新思路。
[Abstract]:With the rapid development of the modern processing industry and the precision manufacturing industry, the high-end instrument and equipment manufacturing field is widely used in the novel micro-device with the micro-scale fine structure, and the existing detection technology cannot directly and effectively evaluate the micro-device, The processing of the fine structure and the development of the related technical field are seriously restricted. At present, with the development of the probe sensor technology, the multi-core optical fiber probe sensor has the advantages of three-dimensional decoupling and measurement, and is used in the micro-scale measurement by the three-coordinate measuring machine. But the multi-core optical fiber probe sensor has the problems of signal crosstalk, low signal demodulation efficiency, high sensor manufacturing cost and the like in the probe. Aiming at the above problems, a self-assembled fiber grating micro-scale sensor for micro-scale measurement and a power demodulation system thereof are provided, The invention reduces the manufacturing cost of the sensor and effectively overcomes the problem of signal crosstalk, solves the problem of high manufacturing cost of the existing probe sensor and crosstalk of the signal in the probe, and simultaneously designs a signal high-speed demodulation system for the micro-scale sensor to realize the fast demodulation of the output signal of the sensor. In this paper, the self-assembly principle of the fiber grating probe, the manufacture of the sensor package, the signal demodulation and the design of the measurement system are studied in detail, and the performance of the self-assembled fiber grating micro-scale sensor is tested in the last experiment. The main contents of the thesis are as follows:1. Research on self-assembled fiber grating micro-scale sensor package. The invention provides a method for manufacturing a multi-core grating probe sensor by using a self-assembly principle, and solves the problems of high cost, signal crosstalk and transmission loss of the existing multi-core fiber grating probe sensor. The self-assembly model of the fiber grating is established, the self-assembly principle of the fiber grating is studied, the feasibility of self-assembly of the single-mode optical fiber on the self-assembly of the multi-core optical fiber is verified, and the self-assembled fiber grating probe sensor is packaged. The optical power demodulation system is designed. The optical power demodulation system based on the differential compensation principle is designed, and the fast demodulation of two output signals of the probe sensor is realized, and the demodulation efficiency is improved by 10 times. A new reference grating pre-stress adjusting device is designed to solve the problems of air disturbance and mechanical vibration. The stability of one-minute stability is increased from 0.25% to 0.07%, and the power resolution of the optical power demodulation circuit board is 7p W. Design of the self-assembled fiber grating probe measurement system. aiming at the micro-scale measurement requirement of the self-assembled fiber grating probe, the mechanical structure of the measuring frame is optimized; and the self-assembled optical fiber grating probe measuring software is prepared, So as to realize the function of automatic adjustment of the attitude of the probe and the automatic measurement of the micro-scale. Self-assembled fiber grating micro-scale measurement system test: on the design of the micro-scale measurement system, the attitude adjustment function of the measuring system and the measuring software is verified, the result shows that the probe attitude is automatically adjusted, and then the performance of the probe measurement system is tested: The experimental results show that the sensor has an orthogonal decoupling capability, and the sensing sensitivity of the sensing group is 100 times that of the non-sensing group, and the stability of the system is 30 nm and the stability of 10 minutes is 60 nm. The radial resolution of the measurement system is 30 nm and the axial resolution is 10 nm. The system repeatability was 90 nm. and finally, the micro-scale sensor on the engine is measured to obtain the extension uncertainty of the measurement result when the micropore diameter is 282.8. m u.m and k = 2, and the degree of expansion is not determined to be 0.4. m The problem of the existing multi-core fiber grating probe sensor in the micro-scale measurement is solved, and a new idea is provided for the micro-scale measurement.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN253;TP212

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