多焦点激光分离厚透明材料
发布时间：2019-04-20 09:35
【摘要】：基于激光热裂纹控制法,提出了多焦点激光分离厚透明材料的方法。通过理论计算与ZEMAX软件模拟相结合的方式,设计了能形成三个焦点的光路系统,并利用该系统进行了夹层玻璃、磷酸二氢钾(KDP)晶体、超白玻璃等透明材料的切割分离实验。结果表明,利用该方法得到的表面平整光滑,无亚表面损伤,粗糙度小,有效解决了单个激光焦点热裂纹分离方法受材料厚度限制的问题,该方法具有很大的应用前景。
[Abstract]:Based on the laser thermal crack control method, a multi-focus laser separation method for thick transparent materials is proposed. Through the combination of theoretical calculation and ZEMAX simulation, a three-focus optical system was designed, and the experiments of cutting and separating transparent materials such as laminated glass, potassium dihydrogen phosphate (KDP) crystal and ultra-white glass were carried out by using the system. The results show that the proposed method has the advantages of smooth surface, no sub-surface damage and small roughness, which effectively solves the problem that the thermal crack separation method with single laser focus is limited by the thickness of the material, and this method has a great application prospect.
【作者单位】： 华中科技大学武汉光电国家实验室;
【基金】：国家自然科学基金(51675205,51475182)
【分类号】：TN249
本文编号：2461489
[Abstract]:Based on the laser thermal crack control method, a multi-focus laser separation method for thick transparent materials is proposed. Through the combination of theoretical calculation and ZEMAX simulation, a three-focus optical system was designed, and the experiments of cutting and separating transparent materials such as laminated glass, potassium dihydrogen phosphate (KDP) crystal and ultra-white glass were carried out by using the system. The results show that the proposed method has the advantages of smooth surface, no sub-surface damage and small roughness, which effectively solves the problem that the thermal crack separation method with single laser focus is limited by the thickness of the material, and this method has a great application prospect.
【作者单位】： 华中科技大学武汉光电国家实验室;
【基金】：国家自然科学基金(51675205,51475182)
【分类号】：TN249
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，本文编号：2461489
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