基于印刷电子工艺的声表面波器件制备及性能研究
发布时间：2019-04-20 11:35
【摘要】：印刷电子(Printed Electronics,PE)技术近几年在电子学领域内发展迅速,应用印刷电子技术,各类电子产品可以像印刷纸制品一样被大批量地生产出来,包括各类柔性存储及显示器件、传感器和驱动器、可以拉伸、弯折的薄膜太阳能电池等。论文在研究了印刷电子技术和SAW技术的应用热点和研究现状的基础上,探讨了将印刷电子工艺技术应用于声表面波(Surface Acoustic Wave,SAW)器件制备的方法。采用印刷电子工艺可以较为灵活地在压电衬底上定义图形。同时,金属纳米颗粒墨水的快速发展和广泛应用,也为应用印刷电子技术制备SAW器件提供了条件。文中分别应用印刷电子工艺中的喷墨打印技术和丝网印刷技术制备SAW滤波器。主要内容包括滤波器的设计与仿真、工艺步骤及参数说明和SAW器件性能测试及结果分析。文中设计的SAW滤波器为横向型滤波器,具有单电极、等叉指宽和等指间间隔的IDT模型结构。分别在石英、铌酸锂和钽酸锂三种压电材料上应用喷墨打印工艺和丝网印刷工艺制备叉指线宽为50μm和200μm的SAW滤波器,对比三种材料的压电特性并对制备的滤波器性能进行测试。针对滤波器性能的测试,论文分别进行了形貌测试和电学性能测试,其中形貌测试包括显微镜观测和台阶仪测试,电学性能测试包括阻抗测试,信号传输测试以及用网络分析仪分析其幅频特性等方式。喷墨打印工艺制备的SAW滤波器在显微镜观测下的叉指线条在尺寸上存在误差;用万用表测量其叉指电极的阻抗,基本位于0.3-2.0Ω之间,导电性能良好;台阶仪测试的叉指电极厚度为0.3-0.5μm,叉指换能器周期与设计值基本吻合,铌酸锂为衬底的滤波器性能较为突出;应用丝网印刷工艺制备的SAW滤波器的叉指线条边沿不够整齐,误差约为50-100μm,导电层厚度为5-10μm,应用铌酸锂和钽酸锂作为衬底制备的滤波器能实现滤波特性。论文通过理论分析和大量实验验证了应用印刷电子技术制备SAW器件的可行性。以铌酸锂作为压电衬底的喷墨打印制作的SAW滤波器的滤波性能较为突出;以铌酸锂和钽酸锂作为压电衬底的丝网印刷制作的SAW滤波器基本实现了滤波特性。测试结果表明,虽然应用印刷电子工艺制备的SAW器件的精确度与微电子工艺相比还有一定的差距,器件的制备工艺方面还有很大的提升空间,但其具有的工艺流程简单、设备和生产成本低廉、不产生废液、废气等有害物质,且适于大规模生产等优势具有十分重要的研究价值和经济意义。
[Abstract]:Printed electronics (Printed Electronics,PE) technology has developed rapidly in the field of electronics in recent years. With the application of printed electronic technology, all kinds of electronic products can be produced in large quantities like printed paper products, including all kinds of flexible storage and display devices. Sensors and actuators that can stretch and bend thin film solar cells, etc. Based on the research of printing electronics and SAW technology, the paper discusses the fabrication method of surface acoustic wave (Surface Acoustic Wave,SAW (saw) devices by using printed electronics technology. The graphic can be defined on piezoelectric substrate flexibly by printing electronic process. At the same time, the rapid development and wide application of metal nanoparticle ink also provide conditions for the fabrication of SAW devices by printing electronic technology. In this paper, inkjet printing technology and screen printing technology are used to fabricate SAW filters. The main contents include filter design and simulation, process steps and parameter description, SAW device performance test and results analysis. The SAW filter designed in this paper is a transverse filter with IDT model structure with single electrode, equal finger width and equal interfinger interval. SAW filters with InterDigital linewidth of 50 渭 m and 200 渭 m were fabricated on quartz, lithium niobate and lithium tantalum piezoelectric materials by inkjet printing and screen printing, respectively. The piezoelectric properties of the three materials were compared and the performance of the fabricated filters was tested. For the test of filter performance, the morphology test and electrical performance test are carried out respectively, in which the morphology test includes microscope observation and step meter test, the electrical performance test includes impedance test, and the electrical performance test includes impedance test. Signal transmission test and network analyzer analysis of its amplitude-frequency characteristics and so on. There is an error in the size of the InterDigital line of the SAW filter prepared by the ink jet printing process, and the impedance of the InterDigital electrode is measured by a multimeter, which is basically between 0.3 and 2.0 惟, and the electrical conductivity is good. The thickness of the InterDigital electrode measured by the step meter is 0.3-0.5 渭 m, and the period of the InterDigital transducer is in good agreement with the designed value. The filter performance on the substrate of lithium niobate is relatively prominent. The edge of the SAW filter fabricated by screen printing is not neat, the error is about 50-100 渭 m, and the thickness of conductive layer is 5-10 渭 m. The filter fabricated by using lithium niobate and lithium tantalum as the substrate can achieve the filtering characteristics. The feasibility of using printed electronic technology to fabricate SAW devices is verified by theoretical analysis and a lot of experiments. The filter performance of SAW filter fabricated by ink jet printing using lithium niobate as piezoelectric substrate is outstanding, and the filter performance of SAW filter fabricated by screen printing with lithium niobate and lithium tantalum as piezoelectric substrate is basically realized. The test results show that although the precision of SAW devices fabricated by printed electronic process is still lower than that of microelectronic technology, there is still a lot of room for improvement in the fabrication process of the devices, but the process flow of the device is simple. Low cost of equipment and production, no waste water, waste gas and other harmful substances, and suitable for large-scale production and other advantages have very important research value and economic significance.
【学位授予单位】：天津理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN65
本文编号：2461570
[Abstract]:Printed electronics (Printed Electronics,PE) technology has developed rapidly in the field of electronics in recent years. With the application of printed electronic technology, all kinds of electronic products can be produced in large quantities like printed paper products, including all kinds of flexible storage and display devices. Sensors and actuators that can stretch and bend thin film solar cells, etc. Based on the research of printing electronics and SAW technology, the paper discusses the fabrication method of surface acoustic wave (Surface Acoustic Wave,SAW (saw) devices by using printed electronics technology. The graphic can be defined on piezoelectric substrate flexibly by printing electronic process. At the same time, the rapid development and wide application of metal nanoparticle ink also provide conditions for the fabrication of SAW devices by printing electronic technology. In this paper, inkjet printing technology and screen printing technology are used to fabricate SAW filters. The main contents include filter design and simulation, process steps and parameter description, SAW device performance test and results analysis. The SAW filter designed in this paper is a transverse filter with IDT model structure with single electrode, equal finger width and equal interfinger interval. SAW filters with InterDigital linewidth of 50 渭 m and 200 渭 m were fabricated on quartz, lithium niobate and lithium tantalum piezoelectric materials by inkjet printing and screen printing, respectively. The piezoelectric properties of the three materials were compared and the performance of the fabricated filters was tested. For the test of filter performance, the morphology test and electrical performance test are carried out respectively, in which the morphology test includes microscope observation and step meter test, the electrical performance test includes impedance test, and the electrical performance test includes impedance test. Signal transmission test and network analyzer analysis of its amplitude-frequency characteristics and so on. There is an error in the size of the InterDigital line of the SAW filter prepared by the ink jet printing process, and the impedance of the InterDigital electrode is measured by a multimeter, which is basically between 0.3 and 2.0 惟, and the electrical conductivity is good. The thickness of the InterDigital electrode measured by the step meter is 0.3-0.5 渭 m, and the period of the InterDigital transducer is in good agreement with the designed value. The filter performance on the substrate of lithium niobate is relatively prominent. The edge of the SAW filter fabricated by screen printing is not neat, the error is about 50-100 渭 m, and the thickness of conductive layer is 5-10 渭 m. The filter fabricated by using lithium niobate and lithium tantalum as the substrate can achieve the filtering characteristics. The feasibility of using printed electronic technology to fabricate SAW devices is verified by theoretical analysis and a lot of experiments. The filter performance of SAW filter fabricated by ink jet printing using lithium niobate as piezoelectric substrate is outstanding, and the filter performance of SAW filter fabricated by screen printing with lithium niobate and lithium tantalum as piezoelectric substrate is basically realized. The test results show that although the precision of SAW devices fabricated by printed electronic process is still lower than that of microelectronic technology, there is still a lot of room for improvement in the fabrication process of the devices, but the process flow of the device is simple. Low cost of equipment and production, no waste water, waste gas and other harmful substances, and suitable for large-scale production and other advantages have very important research value and economic significance.
【学位授予单位】：天津理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN65
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