阵列式芯片特定区域内微流体加热研究
发布时间：2019-05-15 16:44
【摘要】：提出了阵列式芯片特定区域内微流体的加热方法,研制了4×4阵列式聚二甲基硅氧烷芯片及其特定区域的加热组件。在128°YX-LiNbO3基片上光刻16个叉指换能器,其激发的SAW驱动压电基片上油相流体,使其输运到待加热区的传热柱上,在油相流体两侧的叉指换能器上加电信号,激发SAW加热油相流体,并通过传热柱加热阵列式芯片受热区内微流体。以石蜡油微流体为实验对象进行阵列式芯片特定区域微流体加热实验,结果表明,SAW可有效加热阵列式芯片特定区域内石蜡油微流体,在30.0dBm电信号功率作用下,使7.5μL石蜡油温度从22.3℃上升到33.5℃。
[Abstract]:The heating method of microfluidic in the specific region of array chip is proposed, and the 4 脳 4 array polydimethyl siloxane chip and its heating module in specific region are developed. 16 InterDigital Transducers are lithography on 128掳 YX-LiNbO3 substrate. The excited SAW drives the oil phase fluid on the piezoelectric substrate so that it can be transported to the heat transfer column in the zone to be heated, and the electrical signal is added to the InterDigital Transducer on both sides of the oil phase fluid. SAW is excited to heat the oil phase fluid, and the microfluidic in the heating zone of the array chip is heated by the heat transfer column. Taking paraffin oil microfluid as the experimental object, the microfluid heating experiment in the specific area of the array chip is carried out. the results show that SAW can effectively heat the paraffin oil microfluid in the specific area of the array chip, and under the action of 30.0dBm electrical signal power, The temperature of 7.5 渭 L paraffin oil increased from 22.3 鈩，
本文编号：2477639
[Abstract]:The heating method of microfluidic in the specific region of array chip is proposed, and the 4 脳 4 array polydimethyl siloxane chip and its heating module in specific region are developed. 16 InterDigital Transducers are lithography on 128掳 YX-LiNbO3 substrate. The excited SAW drives the oil phase fluid on the piezoelectric substrate so that it can be transported to the heat transfer column in the zone to be heated, and the electrical signal is added to the InterDigital Transducer on both sides of the oil phase fluid. SAW is excited to heat the oil phase fluid, and the microfluidic in the heating zone of the array chip is heated by the heat transfer column. Taking paraffin oil microfluid as the experimental object, the microfluid heating experiment in the specific area of the array chip is carried out. the results show that SAW can effectively heat the paraffin oil microfluid in the specific area of the array chip, and under the action of 30.0dBm electrical signal power, The temperature of 7.5 渭 L paraffin oil increased from 22.3 鈩，
本文编号：2477639
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