基于微波谐振器的微波微等离子体线性阵列源的研究
发布时间：2019-07-10 11:34
【摘要】：本课题由国家自然科学基金项目“小功率微波微等离子体的研究”(批准号：61072007)资助。由于微等离子体的密度高、稳定性好、气体和能量耗费低且便于开发便携且廉价的微等离子体装置,因此微等离子体具有广泛的应用前景,微等离子体源也成为近年来的研究热点。而目前,基于微波谐振器的微波微等离子体线性阵列源存在体积较大和激励的微等离子体分布不均匀等问题。本文根据微带线谐振器理论和模式耦合理论,采用HFSS仿真软件,对一种工作在2.45GHz、放电缝隙为0.1mm的基于微带谐振器的微波微等离子体双线性阵列源进行了研究,分析了相关参数对微波微等离子体双线性阵列源特性的影响。仿真研究表明,馈电点位置、阵列谐振器单元之间的间距和耦合方式、接地板尺寸等对微波微等离子体双线性阵列源的S参数、Q值和放电缝隙处的电磁场分布等有很大的影响。本文还研究了一种工作在2.45GHz、放电缝隙为0.1mmm的基于微带谐振器的微波微等离子体圆形阵列源,在单馈空间耦合、单馈耦合条耦合、双馈空间耦合和双馈耦合条耦合等四种不同结构的情况下,对微波微等离子体圆形阵列源的S参数、Q值和放电缝隙处的电磁场分布进行了研究。本文工作对较大面积和特定形状的微波微等离子体源的研究提供了一定的参考。
文内图片：
图片说明：图１－６微波诱导微等离子体放电结构逡逑
[Abstract]:The subject is funded by the Project "Study on the Microplasma of Small Power Microwave" of the National Natural Science Foundation of China (Approval No.:61072007). Because the density of the microplasma is high, the stability is good, the gas and the energy are low and the portable and cheap micro-plasma device is convenient to be developed, the micro-plasma has a wide application prospect, and the micro-plasma source is also a hot spot in recent years. At present, the microwave micro-plasma linear array source based on the microwave resonator has the problems of large volume and non-uniform distribution of the excited micro-plasma. In this paper, based on the theory of microstrip line resonator and the theory of mode coupling, the microwave micro-plasma bilinear array source based on the microstrip resonator with the discharge gap of 2.45GHz and the discharge gap of 0.1mm is studied by HFSS simulation software. The influence of the related parameters on the source characteristics of the microwave micro-plasma bilinear array is analyzed. The simulation results show that the location of the feed point, the spacing between the array resonator units and the coupling mode, the size of the ground plate and the like have a great influence on the S parameters, the Q value and the electromagnetic field distribution at the discharge gap of the microwave micro-plasma bilinear array source. In this paper, a microwave micro-plasma circular array source based on a microstrip resonator with a gap of 2.45GHz and a discharge gap of 0.1mm is also studied. In the case of single-feed-space coupling, single-feed-coupled-strip coupling, double-fed space coupling and double-fed-coupled-strip coupling, The S parameter, Q value and the distribution of the electromagnetic field at the discharge gap of the microwave micro-plasma circular array source are studied. The work of this paper provides some reference for the study of microwave micro-plasma source with a large area and a certain shape.
【学位授予单位】：华东师范大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN629.1
本文编号：2512576
文内图片：
图片说明：图１－６微波诱导微等离子体放电结构逡逑
[Abstract]:The subject is funded by the Project "Study on the Microplasma of Small Power Microwave" of the National Natural Science Foundation of China (Approval No.:61072007). Because the density of the microplasma is high, the stability is good, the gas and the energy are low and the portable and cheap micro-plasma device is convenient to be developed, the micro-plasma has a wide application prospect, and the micro-plasma source is also a hot spot in recent years. At present, the microwave micro-plasma linear array source based on the microwave resonator has the problems of large volume and non-uniform distribution of the excited micro-plasma. In this paper, based on the theory of microstrip line resonator and the theory of mode coupling, the microwave micro-plasma bilinear array source based on the microstrip resonator with the discharge gap of 2.45GHz and the discharge gap of 0.1mm is studied by HFSS simulation software. The influence of the related parameters on the source characteristics of the microwave micro-plasma bilinear array is analyzed. The simulation results show that the location of the feed point, the spacing between the array resonator units and the coupling mode, the size of the ground plate and the like have a great influence on the S parameters, the Q value and the electromagnetic field distribution at the discharge gap of the microwave micro-plasma bilinear array source. In this paper, a microwave micro-plasma circular array source based on a microstrip resonator with a gap of 2.45GHz and a discharge gap of 0.1mm is also studied. In the case of single-feed-space coupling, single-feed-coupled-strip coupling, double-fed space coupling and double-fed-coupled-strip coupling, The S parameter, Q value and the distribution of the electromagnetic field at the discharge gap of the microwave micro-plasma circular array source are studied. The work of this paper provides some reference for the study of microwave micro-plasma source with a large area and a certain shape.
【学位授予单位】：华东师范大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN629.1
【引证文献】
相关硕士学位论文 前2条
1 邱诗浩;基于微带谐振器的微波微等离子体圆形阵列源的研究[D];华东师范大学;2018年
2 郭义;基于超材料的无线激励微波微等离子体阵列源的研究[D];华东师范大学;2017年
，本文编号：2512576
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