焰熔法生长钛酸锶单晶体生长室内温度分布的数值模拟

发布时间：2018-03-02 17:24

本文选题：焰熔法　切入点：钛酸锶单晶体　出处：《材料导报》2017年16期 　论文类型：期刊论文

【摘要】：通过研究焰熔法生长钛酸锶单晶体过程中生长室内的温度分布特征,分析了H_2和O_2流量、喷嘴孔径对温度分布的影响。结果表明,采用焰熔法生长SrTiO_3晶体时,晶体熔帽表面温度和压力由中心逐渐向外降低;随着H_2流量的增加,中心轴向的最高温度的位置基本不变,晶体熔帽温度和晶体四周的最高温度逐渐升高,只是升高幅度有所减小;晶体熔帽温度、压力及晶体周围烟气温度随O_2流量增大而升高,而轴向最高温度则降低;增加喷嘴的中心孔径将使轴向最高温度、晶体熔帽温度和径向温度梯度降低,而喷嘴的H_2孔径对生长室内轴向和径向温度分布的影响不是很明显。
[Abstract]:The characteristics of temperature distribution in the growth chamber of strontium titanate single crystal grown by flame melting method were studied. The influence of the flow rate of H _ s _ 2 and O _ 2 and the diameter of nozzle on the temperature distribution was analyzed. The results showed that the SrTiO_3 crystal was grown by flame melting method. The surface temperature and pressure of the crystal melting cap gradually decreased from the center to the outside, and with the increase of the flow rate of H _ 2, the position of the highest temperature of the central axial direction basically remained unchanged, and the temperature of the crystal melting cap and the maximum temperature around the crystal gradually increased. The temperature, pressure and flue gas temperature around the crystal increase with the increase of O _ 2 flow rate, while the axial maximum temperature decreases, and the axial maximum temperature increases with the increase of the central aperture of the nozzle. The crystal melting cap temperature and radial temperature gradient are decreased, but the influence of H2 aperture of the nozzle on the axial and radial temperature distribution in the growth chamber is not obvious.
【作者单位】：大连大学环境与化学工程学院;沈阳工程学院新能源学院;东北大学材料科学与工程学院;
【基金】：国家自然科学基金(51472047)
【分类号】：O782.3

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