半导体材料微纳结构的构筑

发布时间：2018-04-02 19:19

本文选题：半导体材料　切入点：微纳结构构筑　出处：《吉林大学》2017年硕士论文

【摘要】：经过几十年的发展,微纳结构已经在诸多领域得到了广泛的应用。近年来半导体微纳材料因其具有的良好特性,已经被广泛研究并应用于解决环境和能源问题。特别是半导体硅基微纳结构材料和氧化锌材料,由于在材料领域有良好的应用前景,因而得到了人们的广泛关注。其中,硅基材料是一种无毒的、具有高量子产率的太阳能电池材料。而氧化锌纳米棒在电子学、光学、生物学、质谱检测、能源等领域有着广泛的应用。本文的研究主要包括以下几部分:一、研究利用纳米压印(NIL)技术和反应离子刻蚀(RIE)技术相结合的方法,通过使用PMMA/Si O2双层膜体系,制备了点状模板、同心圆/环复合模板和环状模板三种不同类型的模板。基于这三种不同的模板,利用平行制备的方法构筑出九种不同的结构。基于点状模板利用反应离子刻蚀(RIE)技术制备柱(pillar)、锥台(mesas-cone)和锥(cone)三种硅结构,同时利用KOH湿法刻蚀技术制备四棱椎台(mesas-pyramid)、金字塔(pyramid)结构。基于同心圆/环复合的模板利用KOH湿法刻蚀技术制备平顶“W”型(mesa-W-shape)、“W”型(W-shape)和倒金字塔(inverted-pyramidal pit)结构。利用环状模板制备孔洞(hole)和倒金字塔(inverted-pyramidal pit)结构。因此,我们提出了一种利用PMMA/Si O2双层膜体制备多种微纳结构的有效方法。二、我们提出一种有效的方法来提高表面辅助激光解吸电离质谱的检测效率。实验基于硅/氧化锌/银复合结构进行SALDI质谱检测。实验通过水热法制备氧化锌纳米棒、热蒸镀沉积金属银,制备平面硅/氧化锌/银复合结构和硅锥/氧化锌/银复合结构。通过调节水热生长过程中反应时间、前驱体浓度、前驱体溶液组分等因素对氧化锌纳米棒高度、直径进行控制;通过调节物理气相沉积的时间对金属银沉积厚度进行控制。最后对两种结构的光谱性质、表面亲水/疏水性进行表征;通过分析不同因素对结构光谱性质和表面亲水/疏水性的影响,探究不同因素对表面辅助激光解吸电离质谱检测的影响。质谱检测中分析物的解离机理也进行了初步的分析与论述。
[Abstract]:After decades of development, micro-nano structure has been widely used in many fields.In recent years, semiconductor micronanomaterials have been widely studied and applied to solve environmental and energy problems because of their good properties.In particular, semiconductor silicon based micro / nano structure materials and zinc oxide materials have attracted wide attention due to their good application prospects in the field of materials.Silicon-based materials are non-toxic solar cell materials with high quantum yield.Zinc oxide nanorods are widely used in electronics, optics, biology, mass spectrometry and energy.The research of this paper mainly includes the following parts: first, the dot template was prepared by using PMMA/Si O 2 bilayer film system by combining the nanoimprint technique and reactive ion etching technique.There are three different types of templates: concentric / circular composite template and annular template.Based on these three different templates, nine different structures were constructed by parallel preparation.Three kinds of silicon structures were fabricated by reactive ion etching (RIEs) technique based on the pitting template. The KOH wet etching technique was used to fabricate the mesas-pyramidine (Pyramida) structure.Based on concentric circle / ring composite template, KOH wet etching technique was used to fabricate the flat-top "W" type "W" type and inverted-pyramidal (inverted-pyramidal) structures.The hole and inverted pyramidal pital structures were fabricated by using annular templates.Therefore, we propose an effective method to fabricate multiple microstructures using PMMA/Si O 2 bilayer membrane.Secondly, we propose an effective method to improve the detection efficiency of surface-assisted laser desorption ionization mass spectrometry.The SALDI mass spectrometry was performed based on the composite structure of silicon / zinc oxide / silver.Zinc oxide nanorods were prepared by hydrothermal method. The planar silicon / zinc oxide / silver composite structure and silicon cone / zinc oxide / silver composite structure were prepared by thermal evaporation deposition.The height and diameter of ZnO nanorods were controlled by adjusting the reaction time during hydrothermal growth, the concentration of precursor and the composition of precursor solution, and the thickness of silver deposition was controlled by adjusting the time of physical vapor deposition.Finally, the spectral properties of the two structures, surface hydrophilicity / hydrophobicity were characterized, and the effects of different factors on the spectral properties and surface hydrophilicity / hydrophobicity of the structures were analyzed.To explore the effect of different factors on surface assisted laser desorption ionization mass spectrometry.The dissociation mechanism of analytes in mass spectrometry is also discussed.
【学位授予单位】：吉林大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：O649

【相似文献】