电感耦合等离子体离子源气体温度特性数值模拟分析
发布时间：2018-11-12 12:54
【摘要】：采用以流场为主耦合电磁场的计算流体力学方法分析ICP离子源的温度特性,并比较加载采样锥前后其温度特性的变化。由于采样锥和炬管构成了相对封闭的空间,加载采样锥后大部分区域温度偏高。在采样锥附近等离子体通道效应明显,中心通道温度从25mm附近开始急剧上升到8 000K左右,在采样锥口前1mm左右急剧下降到6 000K左右。用Discrete Phase Model(DPM)模型分析了不同直径气溶胶颗粒对中心通道气体温度的影响,发现颗粒直径太大会影响中心通道气体温度的稳定性,而直径几微米的气溶胶颗粒电离效率较高。
[Abstract]:The temperature characteristics of ICP ion source were analyzed by using the computational fluid dynamics (CFD) method with the flow field as the main coupling electromagnetic field, and the temperature characteristics of the ICP ion source were compared before and after loading the sampling cone. Because the sampling cone and torch make up a relatively closed space, the temperature of most of the area after loading the sampling cone is on the high side. The plasma channel effect is obvious in the vicinity of the sampling cone. The temperature of the central channel rises sharply from near 25mm to about 8,000 K, and the 1mm decreases sharply to about 6,000 K before the sampling cone. The influence of aerosol particles of different diameters on the gas temperature of the central channel is analyzed by using Discrete Phase Model (DPM) model. It is found that the particle diameter is too large to affect the stability of the gas temperature in the central channel, while the ionization efficiency of aerosol particles with a diameter of several microns is higher.
【作者单位】： 国防科学技术大学理学院;西北核技术研究所;
【基金】：国家重大科学仪器专项(2012YQ250003)资助
【分类号】：O657.31
本文编号：2327164
[Abstract]:The temperature characteristics of ICP ion source were analyzed by using the computational fluid dynamics (CFD) method with the flow field as the main coupling electromagnetic field, and the temperature characteristics of the ICP ion source were compared before and after loading the sampling cone. Because the sampling cone and torch make up a relatively closed space, the temperature of most of the area after loading the sampling cone is on the high side. The plasma channel effect is obvious in the vicinity of the sampling cone. The temperature of the central channel rises sharply from near 25mm to about 8,000 K, and the 1mm decreases sharply to about 6,000 K before the sampling cone. The influence of aerosol particles of different diameters on the gas temperature of the central channel is analyzed by using Discrete Phase Model (DPM) model. It is found that the particle diameter is too large to affect the stability of the gas temperature in the central channel, while the ionization efficiency of aerosol particles with a diameter of several microns is higher.
【作者单位】： 国防科学技术大学理学院;西北核技术研究所;
【基金】：国家重大科学仪器专项(2012YQ250003)资助
【分类号】：O657.31
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本文编号：2327164
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