表面微结构对界面润湿特性的影响研究

发布时间：2018-12-06 11:01

【摘要】：液体在固体表面润湿性的研究是制备超疏水表面的理论基础,因具有良好的应用前景而受到广泛的关注。目前,人们对固液接触润湿性的研究多集中于微结构参数变化对润湿状态的影响,且没有形成较为统一的理论方法。本文在考虑了接触线线张力的基础上,结合微结构其他特征参数对固液接触表面的润湿性进行了研究。本文首先分析了接触线线张力在固液接触润湿中的重要性,并提出了类圆度的概念,得出接触线上线张力对固液接触时能量变化的影响。对微结构相关参数进行研究,得出参数变化对固液接触时接触角和润湿性转变的影响规律。推导出考虑线张力的接触角预测方程。利用L-edit设计不同微结构的形貌和尺寸用于光刻掩膜版的制作。利用等离子刻蚀机在硅表面加工所设计的形貌和特征尺寸,并在部分微结构表面形成一层C4F8钝化膜用以后续实验的对比分析。利用激光共聚焦显微镜对所加工表面的微结构形貌和特征尺寸进行观察测量,为实验结果分析提供参考。对所制备出的表面测量10μl液滴在其上的接触角,发现微结构的存在显著提升了接触角值。对实验测量的接触角数据进行分析,发现10μl液滴在含钝化膜的微结构表面,当间距相同时,三棱柱状微结构表面接触角最大,正六棱柱状微结构表面次之,方柱状微结构表面最小。证明所提出类圆度概念的实验正确性,减小类圆度K可以提升接触角。同时发现随着固液接触面积分数的增大,接触角整体呈现减小趋势。最后验证了提出的接触角测公式的合理性。
[Abstract]:The research on the wettability of liquid on solid surface is the theoretical basis of preparing superhydrophobic surface. At present, the research on wettability of solid-liquid contact is mainly focused on the influence of the change of microstructure parameters on the wetting state, and there is no unified theory and method. In this paper, the wettability of solid-liquid contact surface has been studied based on the tension of contact line and other characteristic parameters of microstructure. In this paper, the importance of contact line tension in solid-liquid contact wetting is analyzed, and the concept of quasi-roundness is put forward, and the influence of contact line tension on the energy change of solid-liquid contact is obtained. The influence of the change of parameters on the contact angle and wettability transition during solid-liquid contact was studied. The contact angle prediction equation considering linear tension is derived. The morphologies and sizes of different microstructures were designed by L-edit for the fabrication of photolithographic mask plates. The surface morphology and characteristic size of silicon were fabricated by plasma etching machine, and a layer of C4F8 passivation film was formed on the surface of some microstructures for the comparison and analysis of subsequent experiments. The microstructure and characteristic size of the machined surface were observed and measured by laser confocal microscope, which provides a reference for the analysis of experimental results. The contact angle of 10 渭 l droplets on the prepared surface was measured, and it was found that the existence of microstructures significantly increased the contact angle. By analyzing the contact angle data measured by experiments, it is found that 10 渭 l droplets are on the surface of microstructures containing passivated films. When the spacing is the same, the contact angle of triangular columnar structures is the largest, and that of hexagonal cylindrical microstructures is the second. The surface of square columnar microstructures is the smallest. The experimental correctness of the proposed concept of roundness is proved, and the contact angle can be increased by reducing the degree of roundness K. It is also found that the contact angle decreases with the increase of solid-liquid contact area fraction. Finally, the rationality of the proposed formula is verified.
【学位授予单位】：西安理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：O647.1

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