复杂制造系统设备维护调度的研究

发布时间：2018-03-11 04:26

本文选题：复杂制造系统　切入点：维护调度　出处：《北京化工大学》2012年硕士论文　论文类型：学位论文

【摘要】：随着现代工业和信息科技的迅猛发展，复杂制造系统的规模逐渐扩大，整个系统的自动化水平不断得到提高。特别是近几十年，提出了许多具有数字化、信息化、智能化等特征的制造系统，如敏捷制造系统、智能制造系统和规模制造系统等。日益复杂化和自动化的制造系统，，对生产设备的稳定性和利用率等方面提出了比较高的要求。如何制定合理的设备维护方案，利用可用的维护资源准确快速的对设备进行维护保养，降低设备故障和成品率损失，提高制造企业的竞争力及可创造的市场价值，是近年来学术界和工程界研究的一个重大课题。本文针对复杂制造系统的典型代表--半导体制造过程的设备维护调度问题，从维护建模、维护策略等方面开展研究，探索合理的设备维护策略： 1.针对连续状态劣化模型的特征，采用Monte Carlo方法模拟设备的连续衰减过程，以周期检测的方式讨论系统控制界限规则的视情维护策略。 2.在考虑设备经济相关性和系统配置的基础上，根据设备劣化水平、故障类型等因素提出事后维修与视情机会维修相结合的多设备系统维护决策。 3.针对半导体制造系统设备故障率、成品率等性能指标，提出一个针对半导体生产设备的两层维护优化结构，其中设备层利用Markov决策过程理论制定针对单设备多产品系统的序贯检测策略；系统层根据设备层的各种信息和有限的可用维护资源制订短期维修调度计划。复杂制造系统设备维护调度所涉及的模型和分析方法非常复杂，所要考虑的制造过程生产计划、生产线WIP等因素较多，还存在许多尚未解决的问题。本文是针对复杂制造系统设备维护调度问题做了一些的分析和探讨，能够对今后相关领域的设备维护调度研究提供有益的借鉴和参考。
[Abstract]:With the rapid development of modern industry and information technology, the scale of complex manufacturing system has gradually expanded, and the automation level of the whole system has been continuously improved. Intelligent manufacturing systems, such as agile manufacturing systems, intelligent manufacturing systems, scale manufacturing systems, etc. Increasingly complex and automated manufacturing systems, This paper puts forward higher requirements on the stability and utilization ratio of production equipment. How to make a reasonable maintenance plan, how to use available maintenance resources to maintain the equipment accurately and quickly, and how to reduce the equipment failure and the loss of finished product rate. In recent years, improving the competitiveness and creating market value of manufacturing enterprises is an important subject studied by academic and engineering circles. This paper aims at the maintenance and scheduling problem of semiconductor manufacturing process, which is a typical representative of complex manufacturing system. From the maintenance modeling, maintenance strategy and other aspects of research, explore reasonable equipment maintenance strategy:. 1. According to the characteristics of the continuous state deterioration model, Monte Carlo method is used to simulate the continuous attenuation process of the equipment, and the maintenance strategy of the system control limit rule is discussed in the way of periodic detection. 2. On the basis of considering the economic relativity of equipment and system configuration, according to the equipment deterioration level and fault type and other factors, this paper puts forward the maintenance decision of multi-equipment system combining after-maintenance and opportunistic maintenance. 3. Aiming at the failure rate and finished product rate of semiconductor manufacturing system, a two-layer maintenance optimization structure for semiconductor manufacturing equipment is proposed. The equipment layer makes use of the Markov decision process theory to formulate the sequential detection strategy for the single equipment multi-product system, and the system layer formulates the short-term maintenance scheduling plan according to the various information of the equipment layer and the limited available maintenance resources. The models and analysis methods involved in equipment maintenance and scheduling of complex manufacturing systems are very complex. There are many factors to be considered, such as manufacturing process production planning, production line WIP and so on. There are still many unsolved problems. This paper makes some analysis and discussion on the equipment maintenance and scheduling problem of complex manufacturing system, which can provide useful reference and reference for the research of equipment maintenance and scheduling in related fields in the future.
【学位授予单位】：北京化工大学
【学位级别】：硕士
【学位授予年份】：2012
【分类号】：TH186;O242.1

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