面向微操作的固—液界面粘着力建模与实验

发布时间：2018-03-29 20:22

本文选题：微操作　切入点：弯月面　出处：《哈尔滨工业大学》2012年硕士论文

【摘要】：随着科学技术的进步人类的操作领域逐渐从宏观扩展到了微观，，如微机电系统（MEMS）装配中，零件特征尺寸在微米量级，并且包含复杂的结构。当构件或系统的尺寸小于1mm时，与物体表面相关的表面力趋向大于体积力，尺度效应和表面效应逐渐凸显。很多情况下将不能通过利用重力来实现被操作物体的释放，需要对微操作过程中的粘着机理和模型进行研究。基于利用固-液界面间的粘着力进行微操作的方案，本文对微操作对象间粘着作用进行研究来预测和控制微操作中操作工具与被操作物体间的粘着力，为利用粘着力设计微操作工具提供理论基础。首先，针对微尺度固体和液体特征进行模拟分析和简化，建立微操作中典型平板-平板、球-平板构件配置下存在液体介质时的界面粘着力模型。包括两种配置的静态毛细作用力的计算模型及动态粘性力的计算模型。针对微操作中典型的拾取、转移和释放过程，分析两种配置中弯月面的断裂距离。其次，利用FLUENT软件对微尺度固-液界面处粘着力作用力模型进行仿真分析，模拟模型中操作工具向上运动时的弯月面动态变化过程。分别对静态毛细作用力和动态粘性力的影响参数进行分析，获取微操作过程中各参数对粘着力的影响规律。最后，建立面向微操作的粘着力测试系统，选择不同材料的微物体，研究两固体分离距离、固体形状、材料等参数对两固体受到的作用力和轮廓形状的影响。与所建立理论模型进行比较，验证所建立模型的可靠性。通过研究微操作过程中工具与被操作物体之间存在液体介质时的粘着力及各参数对粘着力的影响，为利用固-液界面处的粘着力设计微操作方案和工具提供了理论依据。
[Abstract]:With the development of science and technology, the field of human operation has gradually expanded from macroscopic to microscopic. For example, in MEMS assembly, the feature dimensions of parts are in the order of micron and contain complex structures. When the dimensions of components or systems are smaller than 1mm, The surface forces associated with the surface of the object tend to be larger than the volume force, and the scale effect and the surface effect gradually become prominent. In many cases, it will not be possible to use gravity to realize the release of the operated object. The adhesion mechanism and model of micromanipulation need to be studied. Based on the scheme of micromanipulation based on the adhesion force between solid and liquid interface, the adhesion between micromanipulation objects is studied in this paper to predict and control the adhesion between the tool and the operated object. To provide a theoretical basis for the use of adhesion to design micromanipulation tools. First of all, the characteristics of microscale solids and liquids are simulated and simplified, and a typical plate-plate in microoperation is established. The interface adhesion force model with liquid medium in the configuration of spherical plate member. It includes two kinds of static capillary force calculation model and dynamic viscosity force calculation model. In view of the typical picking, transferring and releasing process in microoperation, The fracture distance of meniscus in two configurations is analyzed. Secondly, the adhesion force model at the microscale solid-liquid interface is simulated by using FLUENT software. The dynamic change process of meniscus is simulated when the tool moves upward in the model. The influence parameters of static capillary force and dynamic viscosity force are analyzed respectively to obtain the influence of each parameter on the adhesion force in the process of micro-operation. Finally, a micromanipulation oriented adhesion testing system is established. The separation distance and shape of the two solids are studied by selecting different materials. The influence of material and other parameters on the force and contour shape of two solids is compared with the established theoretical model. To verify the reliability of the established model. By studying the adhesion force between the tool and the operated object in the presence of liquid medium and the influence of the parameters on the adhesion force, It provides a theoretical basis for the design of microoperation schemes and tools by using the adhesion force at the solid-liquid interface.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2012
【分类号】：TH-39

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