气旋式非接触真空吸取技术的研究

发布时间：2018-05-21 09:38

本文选题：非接触 + 旋回流　；参考：《南京理工大学》2011年硕士论文

【摘要】：气旋式非接触真空吸盘作为一种新兴的气动执行元件,可以在对工件进行吸取和搬运的时候与工件保持非接触状态。因此它具有对被吸工件非接触、无损伤、无污染等优点,在制药、半导体等对工件要求无损和高洁净度的行业具有迫切而广泛的应用需求。虽然国际上已有此方面的文献报道,然而由于技术封锁,对气旋式非接触真空吸盘还没有公开的设计方法和理论可以应用。因此,要打破技术封锁,尽快研究出自己的气旋式真空吸取技术,需要对气旋式真空吸取的吸力产生机理、吸盘结构设计、动态工作特性和系统集成等多方面进行深入研究。通过理论分析、试验测试和系统实现等研究工作,本文取得了以下一些研究成果： (1)针对气旋式非接触真空吸盘真空吸力产生和调节的机理性分析需要,采用Fluent软件对吸盘内部流场进行了数值模拟,获得了吸盘内部强旋回流流动的流场分布规律以及吸盘工作参数对吸取力的影响,为吸盘的结构设计和性能测试打下了基础。 (2)构建了吸盘性能综合试验系统,对数值分析所获得的流场分布规律进行了试验验证。试验研究了吸盘工作参数对吸力和工作动态过程的影响,获知影响吸取过程的主要因素是供气流量和吸取时初始间隙。得出为了减小工件振动,应尽量减小初始间隙并采用“先大后小”的流量控制原则,以及为避免扭转效应,气旋式非接触吸盘应多个成对使用的原则。这些结果对于气旋式非接触真空吸盘及其系统设计和操作具有非常重要的参考价值。 (3)设计了一个实际的气旋式非接触真空搬运系统,验证了气旋式真空吸盘的机理分析和试验研究成果,获得了气旋式非接触真空搬运系统的设计和应用的宝贵经验。
[Abstract]:As a new kind of pneumatic actuator, cyclone vacuum sucker can keep non-contact state with the workpiece when it is absorbed and moved. Therefore, it has the advantages of non-contact, no damage and no pollution to the absorbed workpiece, so it has an urgent and extensive application demand in pharmaceutical, semiconductor and other industries which require non-destructive and high cleanliness of the workpiece. Although this aspect has been reported in the international literature, however, due to the technical blockade, there is no open design method and theory of cyclone non-contact vacuum sucker can be applied. Therefore, in order to break the technical blockade and develop the cyclone vacuum suction technology as soon as possible, it is necessary to deeply study the mechanism of suction, the structure design of sucker, the dynamic working characteristics and the system integration. Through theoretical analysis, experimental testing and system implementation, this paper has achieved the following research results: 1) to meet the need of mechanical analysis on the generation and regulation of vacuum suction of cyclone type non-contact vacuum sucker, a numerical simulation of the internal flow field of the sucker is carried out by using Fluent software. The distribution of the flow field and the influence of the working parameters of the sucker on the suction force were obtained, which laid a foundation for the structure design and performance test of the sucker. (2) A comprehensive test system for the performance of the sucker is constructed, and the flow field distribution law obtained by the numerical analysis is verified experimentally. The influence of the working parameters of the sucker on the suction force and the working dynamic process is studied. The main factors affecting the suction process are the gas supply flow rate and the initial clearance of the suction process. It is concluded that in order to reduce the vibration of the workpiece, the initial gap should be reduced as much as possible and the flow control principle of "first big and then small" should be adopted, and in order to avoid torsional effect, the cyclonic non-contact chuck should be used in pairs. These results have very important reference value for the design and operation of cyclone type non-contact vacuum sucker and its system. A practical non-contact vacuum transport system is designed, which verifies the mechanism analysis and experimental research results of cyclone vacuum chuck, and obtains valuable experience in the design and application of cyclone non-contact vacuum transport system.
【学位授予单位】：南京理工大学
【学位级别】：硕士
【学位授予年份】：2011
【分类号】：TH138.9

【引证文献】