氮化硅陶瓷轴承表面DLC膜多尺度力学和摩擦学特性研究

发布时间：2018-06-19 23:22

本文选题：类金刚石碳膜 + 陶瓷轴承　；参考：《哈尔滨工业大学》2012年硕士论文

【摘要】：微纳米尺度的DLC膜广泛应用于工业领域，尤其在陶瓷球轴承中起到了有效的减摩抗磨作用。本文运用分子动力学方法和有限元法来研究DLC膜的压痕和划擦过程，分析了陶瓷球轴承中微纳米DLC膜的力学和摩擦学特性，为微纳米DLC膜的分析方法奠定基础。分别用Tersoff势和EAM势描述氮化硅基体与DLC膜、金属基体与DLC膜接触界面的原子间作用力，然后采用蒸汽均匀冷凝的方法生成DLC膜并通过分析截断半径、密度和势函数对DLC膜属性的影响，确定合适的模拟条件，为后续模拟做好准备。基体对薄膜的力学和摩擦学特性有重要的影响。本文利用分子动力学方法模拟仅受法向力作用下氮化硅和金属铁基体上DLC膜的压痕过程、受法向力和切向力共同作用下无膜和有膜氮化硅的划擦过程，分析了基体、DLC膜密度、膜厚对压痕过程的影响以及DLC膜和划擦深度对划擦过程的影响，为纳米DLC膜在陶瓷轴承中的应用提供理论基础。本文最后采用有限元法研究微纳米DLC膜的压痕过程，分析基体材料、膜厚、膜的弹性模量、基体厚度对DLC膜力学特性的影响及膜厚从纳米过渡到微米时力学特性的变化规律，，并与分子动力学模拟的结果进行比较，确定适合微纳米DLC膜的分析方法。
[Abstract]:Micro-nano-scale DLC films are widely used in industrial fields, especially in ceramic ball bearings. In this paper, the indentation and scratch process of DLC film are studied by molecular dynamics method and finite element method. The mechanical and tribological properties of DLC film in ceramic ball bearing are analyzed, which lays a foundation for the analysis method of DLC film. Tersoff potential and EAM potential were used to describe the interatomic force between silicon nitride substrate and DLC film and the interface between metal substrate and DLC film respectively. Then the DLC film was formed by steam uniform condensation and the truncation radius was analyzed. The effect of density and potential function on the properties of DLC film was determined, and the suitable simulation conditions were determined to prepare for the subsequent simulation. The substrate plays an important role in the mechanical and tribological properties of the films. In this paper, molecular dynamics method is used to simulate the indentation process of DLC film on silicon nitride and iron substrate under normal force only, and the scrape process of silicon nitride film without film and film under the combined action of normal force and tangential force. The density of DLC film on the substrate is analyzed. The effect of film thickness on indentation process and the effect of DLC film and scratch depth on scratch process provide a theoretical basis for the application of nano-DLC film in ceramic bearings. In the end, the indentation process of DLC film is studied by finite element method. The influence of substrate material, film thickness, elastic modulus of film, substrate thickness on the mechanical properties of DLC film and the change of film thickness from nanometer to micron are analyzed. Compared with the results of molecular dynamics simulation, the analytical method of DLC film was determined.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2012
【分类号】：TH133.3;TB383.2

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