基于软刻蚀技术的无阀微泵制造工艺研究

发布时间：2018-07-11 12:22

本文选题：微机电系统 + 无阀微泵　；参考：《华中科技大学》2014年硕士论文

【摘要】：随着MEMS（微机电系统）工艺的发展，，微流体系统已经成为一个非常热门的研究领域，而无阀微泵作为微流体系统的核心动力元件也得到了越来越多的关注。然而，无阀微泵的传统制造工艺方法具有工艺复杂、生产周期长、成本高等不足，为了解决这些工艺不足，本文提出了一种新的设计思想，对无阀微泵的制造工艺进行了深入的研究和适当的改进。本文首先介绍了无阀微泵的工作原理，并通过有限元软件仿真分析得出了收缩管/扩张管的流量及效率随着其主要参数（包括扩张角、长度、最小宽度和泵腔深度）的变化关系。在此基础上，选择优化的参数进行了无阀微泵的平面尺寸设计。然后基于“泵膜与泵体一体化”的设计思想，进行了无阀微泵的模板设计，并以MEMS加工工艺（光刻、ICP刻蚀）为基础，制作了无阀微泵泵体的模板，详细介绍了各工艺的具体流程和参数。用基恩士对制作出的模板进行了二维和三维尺寸测量，以确保满足设计要求。最后利用前面制作好的泵体模板，以软刻蚀工艺为基础，制作出无阀微泵的泵体，并用SEM进行了收缩管/扩张管的三维形貌扫描。详细研究了PDMS与玻璃键合封装的工艺参数，得出了键合强度与活化时间、氧气流量和射频功率之间的关系，并选取优化的参数进行无阀微泵泵体与玻璃的键合封装实验，成功制作出了无阀微泵,并对无阀微泵的性能做了测试。
[Abstract]:With the development of MEMS (Micro-Electromechanical system) technology, micro-fluid system has become a very popular research field, and valveless micro-pump as the core power component of micro-fluid system has been paid more and more attention. However, the traditional manufacturing process of valveless micropump has many disadvantages, such as complex process, long production cycle and high cost. In order to solve these problems, a new design idea is proposed in this paper. The manufacturing process of valveless micropump is studied and improved. In this paper, the working principle of valveless micropump is introduced, and the flow rate and efficiency of shrink tube and expansion tube with its main parameters (including expansion angle and length) are obtained by finite element software simulation analysis. The relationship between minimum width and pump chamber depth. On this basis, the optimized parameters are selected to design the plane dimension of the valveless micropump. Then, based on the design idea of "integration of pump film and pump body", the template design of valveless micropump is carried out, and the template of valveless micropump body is made based on MEMS process (lithography and ICP etching). The specific process and parameters of each process are introduced in detail. The two-dimensional and three-dimensional dimensions of the template were measured with Keenz to ensure that it met the design requirements. In the end, the pump body without valve is fabricated by using the template made in front of the pump, and based on the soft etching technology, the three-dimensional morphology of the shrink tube / expansion tube is scanned by SEM. The process parameters of PDMS and glass bonding package are studied in detail. The relationship between bonding strength and activation time, oxygen flow rate and radio frequency power is obtained. The valveless micropump was successfully manufactured and the performance of the valveless micropump was tested.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TH38

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