基于矩形压电振子间接驱动式隔膜泵的研究
发布时间：2018-11-18 14:36
【摘要】：随着微机电系统技术的发展，压电泵凭借其结构简单、易于微型化等特点得到了广泛的研究和应用。压电隔膜泵是众多压电泵中最典型的一种，人们通过先进的设计理念和制造工艺对它进行优化，使压电隔膜泵的稳定性和输出性能不断完善和提高。在工业生产领域中压电隔膜泵的实际应用日趋广泛，但是特殊应用场合对压电隔膜泵的外形尺寸和输出性能同时提出了更高的要求。 本文结合国家自然科学基金项目《压电型气体隔膜泵设计理论与关键技术研究》的研究，借鉴前期利用共振原理提高压电隔膜泵输出性能的研究成果，，并采用较厚的矩形压电陶瓷制作压电振子，提高了压电振子的输出位移。由矩形压电振子通过传振块间接驱动泵腔隔膜，简化了振动系统的结构。 本文根据矩形压电陶瓷的横向振动模态制作两端固定的矩形压电振子，基于Ansys的压电耦合场对压电振子的振动模态进行了仿真分析。两端固定的矩形压电振子与周边固定的圆形压电振子相比约束减小，增大了其中心输出位移，进而提高压电隔膜泵泵腔的容积变化量。矩形基板两端未粘接压电陶瓷部分刚度相对较小而变形大，基板几何中心粘接陶瓷部分由于刚度较大而变形较小，这样的结构保护了陶瓷。通过实验研究驱动电压和工作频率与矩形压电振子中心振幅的关系，分析矩形压电振子的位移输出特性。 泵腔结构对压电隔膜泵的输出压力和流量有直接的影响，本文通过降低泵腔横截面积和优化隔膜结构来提高隔膜泵的输出性能。应用板壳理论分析计算压电隔膜泵无负载情况下隔膜的挠度，并利用matlab计算泵腔的容积变化量对隔膜进行优化设计。压电隔膜泵的输出性能与隔膜刚度的关系实验，验证了相同驱动条件下较小刚度隔膜的振幅较大，在输出流量和压力方面有明显优势。 为了简化压电隔膜泵的结构，本文选用悬臂梁截止阀。建立悬臂梁阀的振动模型，对阀的开度进行分析。悬臂梁阀片的运动近似于单自由度系统在简谐激励下的振动，存在特定的工作频率使阀的开度达到极大值。压电隔膜泵的输出性能与悬臂梁阀的开度密切相关。通过悬臂梁阀的开度实验研究它的工作状态，找到悬臂梁阀的最佳工作频率，提高压电隔膜泵的输出性能。 建立压电隔膜泵系统的振动模型，分析计算系统的谐振频率。通过调整振动系统的质量和刚度力求研制一款谐振频率较低的压电隔膜泵样机。对共振状态下的隔膜泵进行泵气性能测试，实验结果呈现出一个重要的现象，在悬臂梁阀的最佳工作频率附近虽然隔膜的振幅在持续下降，但隔膜泵的流量和输出压力却同时出现升高。这说明悬臂梁阀的最佳工作频率对隔膜泵的性能影响是不容忽视的，可以进一步调整隔膜泵的谐振频率或者改变阀的最佳工作频率，使两者接近相等，提高隔膜泵的输出性能。
[Abstract]:With the development of MEMS technology, piezoelectric pump has been widely studied and applied with its simple structure and easy miniaturization. Piezoelectric diaphragm pump is the most typical one among many piezoelectric pumps. It is optimized by advanced design concept and manufacturing technology, which makes the stability and output performance of piezoelectric diaphragm pump perfect and improve constantly. The practical application of piezoelectric diaphragm pump is becoming more and more extensive in the field of industrial production. However, in special applications, the size and output performance of piezoelectric diaphragm pump are required to be higher at the same time. Based on the research on the design theory and key technology of piezoelectric gas diaphragm pump, which is a project of National Natural Science Foundation of China, this paper draws lessons from the previous research results of improving the output performance of piezoelectric diaphragm pump by using resonance principle. A thick rectangular piezoelectric ceramic is used to fabricate the piezoelectric vibrator, which improves the output displacement of the piezoelectric oscillator. The diaphragm of the pump cavity is indirectly driven by the rectangular piezoelectric vibrator through the vibration transmission block, which simplifies the structure of the vibration system. Based on the transverse vibration modes of rectangular piezoelectric ceramics, rectangular piezoelectric oscillators with fixed ends are fabricated. The vibration modes of piezoelectric oscillators are simulated and analyzed based on the piezoelectric coupling field of Ansys. Compared with the circular piezoelectric vibrator fixed at both ends, the constraint of the rectangular piezoelectric oscillator is reduced, the output displacement of the center is increased, and the volume change of the pump cavity of the piezoelectric diaphragm pump is increased. The stiffness of unbonded piezoelectric ceramic at both ends of rectangular substrate is relatively small and the deformation is large. The relationship between the driving voltage and the working frequency and the amplitude of the center of the rectangular piezoelectric oscillator is studied experimentally, and the displacement output characteristics of the rectangular piezoelectric oscillator are analyzed. The pump cavity structure has direct influence on the output pressure and flow rate of piezoelectric diaphragm pump. In this paper, the output performance of the diaphragm pump is improved by reducing the cross section area of the pump cavity and optimizing the diaphragm structure. The plate and shell theory is used to analyze and calculate the deflection of piezoelectric diaphragm pump without load, and matlab is used to calculate the volume change of pump cavity to optimize the design of diaphragm. The experiment of the relationship between the output performance of piezoelectric diaphragm pump and the diaphragm stiffness proves that the amplitude of the diaphragm with smaller stiffness is larger under the same driving conditions and has obvious advantages in output flow and pressure. In order to simplify the structure of piezoelectric diaphragm pump, the cantilever beam globe valve is selected in this paper. The vibration model of cantilever beam valve was established and the opening of the valve was analyzed. The motion of the valve plate of the cantilever beam is similar to the vibration of the single degree of freedom system under the simple harmonic excitation, and there is a special working frequency to maximize the opening of the valve. The output performance of piezoelectric diaphragm pump is closely related to the opening of cantilever valve. The optimum working frequency of cantilever beam valve is found through the experimental study of the opening of cantilever valve and the output performance of piezoelectric diaphragm pump is improved. The vibration model of piezoelectric diaphragm pump system is established and the resonance frequency of the system is analyzed and calculated. By adjusting the mass and stiffness of vibration system, a prototype of piezoelectric diaphragm pump with low resonant frequency is developed. The pump performance of diaphragm pump in resonant state is tested. The experimental results show an important phenomenon. The amplitude of diaphragm decreases continuously near the optimum working frequency of cantilever valve. However, the diaphragm pump flow and output pressure at the same time increased. This shows that the optimum working frequency of cantilever beam valve can not be ignored and the resonant frequency of diaphragm pump can be further adjusted or the optimum working frequency of valve can be changed so that the two are close to the same and the output performance of diaphragm pump can be improved.
【学位授予单位】：吉林大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TH323
本文编号：2340312
[Abstract]:With the development of MEMS technology, piezoelectric pump has been widely studied and applied with its simple structure and easy miniaturization. Piezoelectric diaphragm pump is the most typical one among many piezoelectric pumps. It is optimized by advanced design concept and manufacturing technology, which makes the stability and output performance of piezoelectric diaphragm pump perfect and improve constantly. The practical application of piezoelectric diaphragm pump is becoming more and more extensive in the field of industrial production. However, in special applications, the size and output performance of piezoelectric diaphragm pump are required to be higher at the same time. Based on the research on the design theory and key technology of piezoelectric gas diaphragm pump, which is a project of National Natural Science Foundation of China, this paper draws lessons from the previous research results of improving the output performance of piezoelectric diaphragm pump by using resonance principle. A thick rectangular piezoelectric ceramic is used to fabricate the piezoelectric vibrator, which improves the output displacement of the piezoelectric oscillator. The diaphragm of the pump cavity is indirectly driven by the rectangular piezoelectric vibrator through the vibration transmission block, which simplifies the structure of the vibration system. Based on the transverse vibration modes of rectangular piezoelectric ceramics, rectangular piezoelectric oscillators with fixed ends are fabricated. The vibration modes of piezoelectric oscillators are simulated and analyzed based on the piezoelectric coupling field of Ansys. Compared with the circular piezoelectric vibrator fixed at both ends, the constraint of the rectangular piezoelectric oscillator is reduced, the output displacement of the center is increased, and the volume change of the pump cavity of the piezoelectric diaphragm pump is increased. The stiffness of unbonded piezoelectric ceramic at both ends of rectangular substrate is relatively small and the deformation is large. The relationship between the driving voltage and the working frequency and the amplitude of the center of the rectangular piezoelectric oscillator is studied experimentally, and the displacement output characteristics of the rectangular piezoelectric oscillator are analyzed. The pump cavity structure has direct influence on the output pressure and flow rate of piezoelectric diaphragm pump. In this paper, the output performance of the diaphragm pump is improved by reducing the cross section area of the pump cavity and optimizing the diaphragm structure. The plate and shell theory is used to analyze and calculate the deflection of piezoelectric diaphragm pump without load, and matlab is used to calculate the volume change of pump cavity to optimize the design of diaphragm. The experiment of the relationship between the output performance of piezoelectric diaphragm pump and the diaphragm stiffness proves that the amplitude of the diaphragm with smaller stiffness is larger under the same driving conditions and has obvious advantages in output flow and pressure. In order to simplify the structure of piezoelectric diaphragm pump, the cantilever beam globe valve is selected in this paper. The vibration model of cantilever beam valve was established and the opening of the valve was analyzed. The motion of the valve plate of the cantilever beam is similar to the vibration of the single degree of freedom system under the simple harmonic excitation, and there is a special working frequency to maximize the opening of the valve. The output performance of piezoelectric diaphragm pump is closely related to the opening of cantilever valve. The optimum working frequency of cantilever beam valve is found through the experimental study of the opening of cantilever valve and the output performance of piezoelectric diaphragm pump is improved. The vibration model of piezoelectric diaphragm pump system is established and the resonance frequency of the system is analyzed and calculated. By adjusting the mass and stiffness of vibration system, a prototype of piezoelectric diaphragm pump with low resonant frequency is developed. The pump performance of diaphragm pump in resonant state is tested. The experimental results show an important phenomenon. The amplitude of diaphragm decreases continuously near the optimum working frequency of cantilever valve. However, the diaphragm pump flow and output pressure at the same time increased. This shows that the optimum working frequency of cantilever beam valve can not be ignored and the resonant frequency of diaphragm pump can be further adjusted or the optimum working frequency of valve can be changed so that the two are close to the same and the output performance of diaphragm pump can be improved.
【学位授予单位】：吉林大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TH323
【参考文献】
相关期刊论文 前6条
1 裴先茹;高海荣;;压电材料的研究和应用现状[J];安徽化工;2010年03期
2 阚君武,杨志刚,程光明;压电泵的现状与发展[J];光学精密工程;2002年06期
3 谢海峰;吴越;接勐;杨志刚;王兴元;;磁力弹簧式压电共振型气泵的设计[J];光学精密工程;2012年07期
4 焦小卫,黄卫清,赵淳生;压电泵技术的发展及其应用[J];微电机(伺服技术);2005年05期
5 刘长庚,周兆英,王晓浩,叶雄英;压电驱动微型喷雾器的研究[J];压电与声光;2001年04期
6 ;Analysis on Flow Field of the Valveless Piezoelectric Pump with Two Inlets and One Outlet and a Rotating Unsymmetrical Slopes Element[J];Chinese Journal of Mechanical Engineering;2012年03期
本文编号：2340312
本文链接：https://www.wllwen.com/kejilunwen/jixiegongcheng/2340312.html
