基于硅基底微柱结构的超疏水表面的制备及其摩擦学性能研究
发布时间：2018-11-23 08:22
【摘要】：超疏水表面在自然界和工农业生产中得到了广泛的应用,润湿性是衡量超疏水表面疏水性强弱的重要指标之一,主要由表面微观结构和表面化学组成共同决定。只改变固体表面化学成分,很难使表面达到超疏水的效果,因此通过表面形貌来控制表面润湿性在超疏水表面的制备过程中起到了关键性作用。 本文以单晶硅片为基底,利用感应耦合等离子体刻蚀技术(ICP),在硅片表面加工微米级微柱结构阵列,随后在其表面自组装一层十八烷基三氯硅烷(OTS)分子膜,实现超疏水。并应用能量色散光谱仪(EDS)、电子隧道扫描显微镜(SEM)、三维激光共聚焦显微镜、原子力显微镜(AFM)和接触角测量仪等设备分别对单纯加工了微柱结构阵列的硅片和加工了微柱结构阵列并自组装OTS分子膜的硅片进行了表面形貌、化学成分和润湿性的表征。通过原子力显微镜(AFM)研究了OTS分子膜的摩擦学性能。主要研究内容归纳如下： 硅片表面加工微柱结构阵列后,实现了从亲水向疏水的转变。硅片表面疏水性随着微柱结构尺寸的变化发生规律性变化。 在加工了微柱结构的硅片表面自组装OTS分子膜后,部分硅片实现了超疏水,最大接触角为157.35°,硅片表面疏水性随着微柱结构尺寸的变化发生规律性变化。水滴在硅片表面的接触状态为Cassie复合接触状态,既有固/液接触又有气/液接触。 硅片表面的OTS分子膜减小了表面摩擦力和表面黏着力,提高了硅片表面摩擦学性能。
[Abstract]:Superhydrophobic surface has been widely used in nature and industrial and agricultural production. Wettability is one of the important indexes to measure the hydrophobicity of superhydrophobic surface, which is mainly determined by the microstructure and chemical composition of the surface. It is difficult to achieve superhydrophobic effect by only changing the chemical composition of solid surface, so controlling surface wettability by surface morphology plays a key role in the preparation of superhydrophobic surface. In this paper, we use inductively coupled plasma etching technique (ICP),) to fabricate microcolumn arrays on silicon wafers on a single crystal silicon substrate, and then self-assemble an octadecyl trichlorosilane (OTS) molecular film on the surface of monocrystalline silicon wafers. Realize super hydrophobic. The energy dispersive spectrometer (EDS), electron tunnel scanning microscope (SEM), 3D laser confocal microscope was used. Atomic force microscope (AFM) (AFM) and contact angle measuring instrument (AFM) were used to characterize the surface morphology, chemical composition and wettability of silicon wafers which were fabricated by microcolumn arrays and self-assembled OTS films respectively. The tribological properties of OTS films were studied by atomic force microscope (AFM) (AFM). The main research contents are summarized as follows: the hydrophilic to hydrophobic transition is realized after the fabrication of the microcolumn array on the wafer surface. The hydrophobicity of silicon wafer surface changes regularly with the change of microcolumn size. After processing the self-assembled OTS molecular film on the wafer with microcolumn structure, some of the wafers were superhydrophobic, with a maximum contact angle of 157.35 掳. The hydrophobicity of the wafer surface changed regularly with the change of the size of the microcolumn structure. The contact state of water droplets on the surface of silicon wafer is Cassie compound contact state, both solid / liquid contact and gas / liquid contact. The surface friction force and the surface adhesion of the OTS molecular film on the silicon wafer are reduced, and the tribological properties of the silicon wafer surface are improved.
【学位授予单位】：北京交通大学
【学位级别】：硕士
【学位授予年份】：2011
【分类号】：TH117
本文编号：2350905
[Abstract]:Superhydrophobic surface has been widely used in nature and industrial and agricultural production. Wettability is one of the important indexes to measure the hydrophobicity of superhydrophobic surface, which is mainly determined by the microstructure and chemical composition of the surface. It is difficult to achieve superhydrophobic effect by only changing the chemical composition of solid surface, so controlling surface wettability by surface morphology plays a key role in the preparation of superhydrophobic surface. In this paper, we use inductively coupled plasma etching technique (ICP),) to fabricate microcolumn arrays on silicon wafers on a single crystal silicon substrate, and then self-assemble an octadecyl trichlorosilane (OTS) molecular film on the surface of monocrystalline silicon wafers. Realize super hydrophobic. The energy dispersive spectrometer (EDS), electron tunnel scanning microscope (SEM), 3D laser confocal microscope was used. Atomic force microscope (AFM) (AFM) and contact angle measuring instrument (AFM) were used to characterize the surface morphology, chemical composition and wettability of silicon wafers which were fabricated by microcolumn arrays and self-assembled OTS films respectively. The tribological properties of OTS films were studied by atomic force microscope (AFM) (AFM). The main research contents are summarized as follows: the hydrophilic to hydrophobic transition is realized after the fabrication of the microcolumn array on the wafer surface. The hydrophobicity of silicon wafer surface changes regularly with the change of microcolumn size. After processing the self-assembled OTS molecular film on the wafer with microcolumn structure, some of the wafers were superhydrophobic, with a maximum contact angle of 157.35 掳. The hydrophobicity of the wafer surface changed regularly with the change of the size of the microcolumn structure. The contact state of water droplets on the surface of silicon wafer is Cassie compound contact state, both solid / liquid contact and gas / liquid contact. The surface friction force and the surface adhesion of the OTS molecular film on the silicon wafer are reduced, and the tribological properties of the silicon wafer surface are improved.
【学位授予单位】：北京交通大学
【学位级别】：硕士
【学位授予年份】：2011
【分类号】：TH117
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相关期刊论文 前3条
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