光刻投影物镜动镜柔顺定位机构模型修正及分析

发布时间：2019-04-15 23:27

【摘要】：光刻投影物镜是光刻机的核心部件。为了保证投影光严苛的波像差要求，投影物镜内部具有可调整的动镜，以便实现对其位置姿态进行调整，以消除由于加工和装调误差带来的波像差，从而保证曝光图形的转移精度。柔顺定位机构是基于柔性铰链弹性变形和压电驱动技术的多自由度柔顺微动精密定位机构，是光刻机动镜的调整机构的主要部件。由于柔顺定位机构中的柔性铰链刚度低，对环境振动响应剧烈，为了保证物镜稳定动态成像质量，需要掌握其结构动力学特性。因此，本文进行了以下四方面的分析研究： (1)分析了柔顺定位机构工作原理和结构特性，对其进行有限元仿真建模和模态试验，对比分析建模误差，基于谐波响应分析法确定修正的目标函数，修正变量和约束条件，使修正后的模型误差在5%以内，达到分析精度要求。 (2)依据固定结合面刚度阻尼理论，推导了柔顺定位机构螺栓连接面的刚度。将其作为初值进行参数修正得到了收敛解，该收敛解在理论解的10%内变动，表明刚度理论推导正确，修正方法有效。 (3)依据修正后的模型，，分析了柔顺定位机构的驱动力-位移关系，确定机构的工作空间范围。分析表明，机构在X、Y、Z三个方向的有效行程达到了设计要求。 (4)对柔顺定位机构的修正模型进行随机振动分析和镜面重要像差分析，分析结果表明，该修正模型能够准确的反映机构对环境振动的响应和对镜片像差的影响程度，可以为今后的结构优化设计，镜片变形分析、振动补偿和控制提供重要依据。
[Abstract]:Lithography projector lens is the core component of lithography machine. In order to ensure the demanding wavefront aberration requirement of projected light, the projection objective lens has adjustable moving lens in order to adjust its position and attitude, so as to eliminate the wave aberration caused by machining and adjusting errors. So as to ensure the transfer accuracy of the exposure pattern. Flexible positioning mechanism is a multi-degree-of-freedom micro-positioning mechanism based on flexure hinge elastic deformation and piezoelectric drive technology. It is the main part of the adjusting mechanism of lithography mirror. Due to the low stiffness of flexure hinges in compliant positioning mechanism and the severe response to environmental vibration, it is necessary to master the dynamic characteristics of the structure in order to ensure the stable dynamic imaging quality of the objective lens. Therefore, the following four aspects of analysis and research are carried out in this paper: (1) the working principle and structural characteristics of compliant positioning mechanism are analyzed, and the finite element simulation modeling and modal test are carried out, and the modeling errors are compared and analyzed. Based on the harmonic response analysis method, the modified objective function is determined, the variables and constraints are modified, the error of the modified model is less than 5%, and the accuracy of the analysis is met. (2) according to the stiffness and damping theory of fixed joint surface, the stiffness of bolt connection surface of compliant positioning mechanism is derived. The convergence solution is obtained by parameter correction as the initial value. The convergence solution changes within 10% of the theoretical solution, which shows that the stiffness theory is correct and the modified method is effective. (3) according to the modified model, the driving force-displacement relationship of compliant positioning mechanism is analyzed, and the workspace range of the mechanism is determined. The analysis shows that the effective stroke of the mechanism in X, Y and Z directions meets the design requirements. (4) the random vibration analysis and mirror aberration analysis of the modified model of compliant positioning mechanism are carried out. The results show that the modified model can accurately reflect the response of the mechanism to environmental vibration and the degree of influence on the aberration of lens, and the results show that the modified model can accurately reflect the response of the mechanism to environmental vibration and the degree of influence on lens aberration. It can provide important basis for structural optimization design, lens deformation analysis, vibration compensation and control.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TH74;TH112

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