基于光致抗蚀法制作的离子牵引微泵结构设计及性能研究
发布时间：2019-05-07 06:35
【摘要】：离子牵引泵是一种以库仑力作为主导驱动力的电流体动力泵，在未来的微电子散热和微流控等领域有着广阔的应用前景。本文基于电流体动力学基本原理，采用光致抗蚀法设计制造了具有多种结构和尺寸参数的离子牵引泵用电极片，并组装成平板型微泵，利用数值模拟的方法研究了腔体高度对于微泵性能的影响，又对各种参数的电极片对微泵性能的影响进行了实验和分析。主要内容如下： （1）电极片的结构设计与制备 利用正交实验法设计具有多种尺寸参数和图形结构的电极。选用光致抗蚀法作为电极图形的刻蚀方法，选用FR-4型环氧玻纤维布覆铜板作为电极片的基体材料。在制作工艺中增加沉金工艺，使电极表面形成镀金层，以减少后期实验过程中电极的腐蚀。通过梳线线宽，电极边缘间距，凸点尖端圆弧半径以及掏蚀深度四个参数对制作完成后的电极结构尺寸及其误差进行了评价。 （2）介电液体中电极片电压-电流关系研究 根据实验过程中存在的泵体易爆炸，丙酮工质易挥发等潜在危险，自主搭建具有较高安全性能的实验平台。利用实验平台对不同结构参数的电极片电压-电流关系（U-I关系）进行测试。对不同电压下，电流的变化规律进行了总结和分析。此外还研究了电极的梳线线宽，电极边缘间距和凸点结构对于电压-电流关系（U-I关系）的影响。 （3）离子牵引微泵简化模型的数值模拟 根据离子牵引微泵结构重复性的特点对离子牵引泵数值模型进行了简化。选用COMSOL Multiphysics软件来进行数值求解。通过利用电场控制方程，电荷传输方程和流体控制方程三组求解方程，并对应采用COMSOL软件中静电场，稀物质传递和层流模块及其之间的耦合来实现数值求解。此外还将数值计算结果与实验结果进行了部分比对，并在结果的趋势变化上得到了一致。通过对数值结果的分析得出微泵腔体的高度具有最优值，同时也说明利用稀物质传递过程代替介电液体中离子注入过程来进行模型计算的建模方法是可行的。 （4）电极片结构对微泵性能的影响 对平板型微泵的结构进行了设计，同时针对性地设计了能够满足测试精度要求的流量，，泵压测试装置，并对流量和泵压转换的计算方法进行了说明。分别分析了电极边缘间距，线宽，凸点结构和焦耳热对于微泵流量和泵压的影响。在几种影响参数中梳线的线宽对于微泵动力效果影响最为明显，梳线宽度越大就能够提供越大流量和越高的泵压；此外，还研究了焦耳热对于微泵动力效果的削弱作用。
[Abstract]:Ion traction pump is a kind of electrohydrodynamic pump with Coulomb force as the main driving force. It has a wide application prospect in the fields of microelectronic heat dissipation and microfluidic in the future. Based on the basic principle of electrohydrodynamics, the electrode plate for ion traction pump with various structure and size parameters was designed and fabricated by photoresist method, and assembled into flat-plate micro-pump. The influence of cavity height on the performance of micro-pump is studied by numerical simulation, and the effects of electrode plates with various parameters on the performance of micro-pump are tested and analyzed. The main contents are as follows: (1) the structure design and preparation of electrode plate are as follows: (1) the electrode with various size parameters and graphic structure is designed by orthogonal experiment. The photoresist method is used as the etching method of the electrode pattern, and the FR- 4 epoxy glass fiber cloth copper clad plate is selected as the substrate material of the electrode plate. In order to reduce the corrosion of the electrode during the later experiment, gold plating layer was formed on the surface of the electrode by adding the gold deposition process in the fabrication process. The size and error of electrode structure after fabrication were evaluated by four parameters, such as line width of comb, distance between electrode edges, radius of arc at the point of convex point and depth of cutting. (2) study on the voltage-current relationship of electrode plate in dielectric liquid according to the potential danger of easy explosion of pump body and volatilization of acetone working fluid, the experimental platform with high safety performance can be built independently. The voltage-current relationship (U-I relationship) of electrode plates with different structure parameters was tested on an experimental platform. The law of current variation under different voltages is summarized and analyzed. In addition, the influence of comb linewidth, edge spacing and convex structure on the voltage-current relationship (U-I) is also studied. (3) numerical simulation of the simplified model of ion-traction micro-pump the numerical model of ion-traction pump is simplified according to the repeatability of the structure of ion-traction micro-pump. The numerical solution is carried out by using COMSOL Multiphysics software. Three sets of equations are solved by using electric field control equation, charge transfer equation and fluid control equation, and the numerical solution is realized by using electrostatic field, thin matter transfer and laminar flow module and their coupling in COMSOL software. In addition, the numerical results are compared with the experimental results, and the trend of the results is consistent. Through the analysis of the numerical results, it is found that the height of the micro-pump cavity has the optimal value, and it is also shown that the modeling method of using the thin material transfer process instead of the ion implantation process in the dielectric liquid is feasible. (4) the structure of the flat-plate micro-pump is designed by the influence of the electrode structure on the performance of the micro-pump. At the same time, the flow rate and pump pressure testing device which can meet the requirements of the test precision is designed. The calculation method of flow rate and pump pressure conversion is explained. The effects of electrode edge spacing, linewidth, convex structure and Joule heat on the flow rate and pump pressure of micropump are analyzed. Among the parameters, the linewidth of the comb wire has the most obvious influence on the dynamic effect of the micro-pump, and the larger the width of the comb line, the greater the flow rate and the higher pump pressure. In addition, the weakening effect of Joule heat on the dynamic effect of the micro-pump is also studied.
【学位授予单位】：华南理工大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TH38
本文编号：2470847
[Abstract]:Ion traction pump is a kind of electrohydrodynamic pump with Coulomb force as the main driving force. It has a wide application prospect in the fields of microelectronic heat dissipation and microfluidic in the future. Based on the basic principle of electrohydrodynamics, the electrode plate for ion traction pump with various structure and size parameters was designed and fabricated by photoresist method, and assembled into flat-plate micro-pump. The influence of cavity height on the performance of micro-pump is studied by numerical simulation, and the effects of electrode plates with various parameters on the performance of micro-pump are tested and analyzed. The main contents are as follows: (1) the structure design and preparation of electrode plate are as follows: (1) the electrode with various size parameters and graphic structure is designed by orthogonal experiment. The photoresist method is used as the etching method of the electrode pattern, and the FR- 4 epoxy glass fiber cloth copper clad plate is selected as the substrate material of the electrode plate. In order to reduce the corrosion of the electrode during the later experiment, gold plating layer was formed on the surface of the electrode by adding the gold deposition process in the fabrication process. The size and error of electrode structure after fabrication were evaluated by four parameters, such as line width of comb, distance between electrode edges, radius of arc at the point of convex point and depth of cutting. (2) study on the voltage-current relationship of electrode plate in dielectric liquid according to the potential danger of easy explosion of pump body and volatilization of acetone working fluid, the experimental platform with high safety performance can be built independently. The voltage-current relationship (U-I relationship) of electrode plates with different structure parameters was tested on an experimental platform. The law of current variation under different voltages is summarized and analyzed. In addition, the influence of comb linewidth, edge spacing and convex structure on the voltage-current relationship (U-I) is also studied. (3) numerical simulation of the simplified model of ion-traction micro-pump the numerical model of ion-traction pump is simplified according to the repeatability of the structure of ion-traction micro-pump. The numerical solution is carried out by using COMSOL Multiphysics software. Three sets of equations are solved by using electric field control equation, charge transfer equation and fluid control equation, and the numerical solution is realized by using electrostatic field, thin matter transfer and laminar flow module and their coupling in COMSOL software. In addition, the numerical results are compared with the experimental results, and the trend of the results is consistent. Through the analysis of the numerical results, it is found that the height of the micro-pump cavity has the optimal value, and it is also shown that the modeling method of using the thin material transfer process instead of the ion implantation process in the dielectric liquid is feasible. (4) the structure of the flat-plate micro-pump is designed by the influence of the electrode structure on the performance of the micro-pump. At the same time, the flow rate and pump pressure testing device which can meet the requirements of the test precision is designed. The calculation method of flow rate and pump pressure conversion is explained. The effects of electrode edge spacing, linewidth, convex structure and Joule heat on the flow rate and pump pressure of micropump are analyzed. Among the parameters, the linewidth of the comb wire has the most obvious influence on the dynamic effect of the micro-pump, and the larger the width of the comb line, the greater the flow rate and the higher pump pressure. In addition, the weakening effect of Joule heat on the dynamic effect of the micro-pump is also studied.
【学位授予单位】：华南理工大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TH38
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