基于微环谐振器的甲烷传感器
发布时间：2019-03-06 16:05
【摘要】：提出了一种新型的基于微环谐振器的甲烷传感器。该传感器通过微环表层的穴番A涂层来增加微环的有效折射率,使微环谐振器中谐振波长随甲烷浓度的增加而向右漂移;通过测量输出光信号的谐振波长推算出甲烷浓度。理论分析结果表明,该传感器的谐振波长变化范围在一个自由光谱范围内,甲烷浓度测量范围为0~15%;对比SOI材料和聚合物材料、单面敏感膜和三面敏感膜的测量结果,得出聚合物材料三面敏感膜微环的谐振波长变化幅度较大,测量灵敏度为60pm。
[Abstract]:A new methane sensor based on micro-ring resonator is proposed. The sensor increases the effective refractive index of the micro-ring by coating the surface layer of the micro-ring, which makes the resonance wavelength drift to the right with the increase of methane concentration, and calculates the methane concentration by measuring the resonance wavelength of the output light signal. The theoretical analysis results show that the resonant wavelength range of the sensor is within a free spectrum range, and the measurement range of methane concentration is 0. 15%. Comparing the measurement results of SOI material and polymer material, one-sided sensitive film and three-sided sensitive film, it is concluded that the resonant wavelength of the three-sided sensitive film microring of polymer material varies greatly, and the measuring sensitivity is 60pm.
【作者单位】： 北京市煤炭矿用机电设备技术开发有限公司;中国矿业大学(北京)机电与信息工程学院;
【基金】：国家自然科学基金资助项目(U1261125) 北京市教育委员会创新团队建设提升计划资助项目(IDHT20130511)
【分类号】：TD712.55
本文编号：2435677
[Abstract]:A new methane sensor based on micro-ring resonator is proposed. The sensor increases the effective refractive index of the micro-ring by coating the surface layer of the micro-ring, which makes the resonance wavelength drift to the right with the increase of methane concentration, and calculates the methane concentration by measuring the resonance wavelength of the output light signal. The theoretical analysis results show that the resonant wavelength range of the sensor is within a free spectrum range, and the measurement range of methane concentration is 0. 15%. Comparing the measurement results of SOI material and polymer material, one-sided sensitive film and three-sided sensitive film, it is concluded that the resonant wavelength of the three-sided sensitive film microring of polymer material varies greatly, and the measuring sensitivity is 60pm.
【作者单位】： 北京市煤炭矿用机电设备技术开发有限公司;中国矿业大学(北京)机电与信息工程学院;
【基金】：国家自然科学基金资助项目(U1261125) 北京市教育委员会创新团队建设提升计划资助项目(IDHT20130511)
【分类号】：TD712.55
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