基于Color Filter的Rework流程优化研究

发布时间：2018-01-15 11:32

本文关键词：基于Color Filter的Rework流程优化研究　出处：《上海交通大学》2014年硕士论文　论文类型：学位论文

【摘要】：薄膜晶体管液晶显示器,是以液晶作为介质,以薄膜晶体管和彩色过滤片为控制元器件的集大规模半导体集成电路技术和平板光源技术于一体的光电子产品。由彩色滤光片Color Filter、TFT面板、偏光板、模组部分组成,其中Color Filter是TFT_LCD的重要组成部分,也是其性能参数的重要决定因数。Rework生产线是彩色过滤片CF各段制程产生的不良基板回收处理中心。SVA_FF 5G新生产线建成后,在取样阶段,由于市场需求变化,致使新产品功能变化。为满足工艺要求,蚀刻药液成分需要更换,从盐酸换成硝酸。迫使Rework不得不改造,即在原有基础上提高蚀刻、剥离能力、清洗能力。在面临工期短,药液成分不确定,改造任务大,并且在不能影响现有生产能力的条件下。论文总结了Rework流程再造中关键环节、采用方法与采用技术,首先从改造前后药液成分的变化着手,分析Etch及Strip药液种类和使用温度的变化对设备提出的更高要求。然后再由各单元对接触药液部分影响形成设备材质和部件的更换清单。由此分别对Etch、Strip、Clean模块进行针对性部件变更。再在现场大量流片观测改造后玻璃基板良品率,优化改造前后工艺参数的变化。最后则是对现场与控制室的通讯配置作了简要说明。项目改造实施后,由客户的“投诉”,引出动态项目管理。通过客户反馈对Rework玻璃基板管理,药液管理,环境管理,设备管理上的改进。新的Rework生产线改造,大大降低了单片玻璃基板药液单耗量,并使Rework良品率从50%上升到85%以上。为客户节约了大量生产成本,提高了其新产品的市场竞争力。本项目实施方法,为同行的设备改造提供了宝贵经验,也为高精端设备引进中国的更好增值服务话题的展开提供了基础。
[Abstract]:Thin film transistor liquid crystal display is liquid crystal as the medium. Optoelectronic products with thin film transistors and color filters as control components are integrated with large scale semiconductor integrated circuit technology and flat panel light source technology. Color filter Color Filter. TFT panel, polarizing board, module component, where Color Filter is an important part of TFT_LCD. It is also an important determinant factor of its performance parameters. Rework production line is a new production line of color filter CF produced by bad substrate recovery. SVAFAFF 5G. In the sampling stage, due to the change of market demand, the function of the new product changes. In order to meet the requirements of the process, the composition of the etch solution needs to be replaced, from hydrochloric acid to nitric acid, forcing Rework to have to be modified. That is, on the basis of the original to improve etching, stripping ability, cleaning ability. In the face of a short time limit, composition of the solution is uncertain, the transformation task is large. And under the condition that the existing production capacity can not be affected, the paper summarizes the key links in Rework process reengineering, the adoption of methods and technologies, first of all, from the change of the composition of the pharmaceutical solution before and after the transformation. This paper analyzes the higher requirements of the Etch and Strip liquid types and the change of the use temperature for the equipment. Then, each unit influences the contact liquid part to form the replacement list of the equipment material and parts. Yes, Etch. The StripCleaner module changes the specific parts. Then the improvement rate of glass substrates is observed in a large number of flow sheets in the field. The change of process parameters before and after optimization. Finally, the communication configuration between the site and the control room is briefly explained. After the project transformation is carried out, the customer complains. Introduction of dynamic project management. Through customer feedback on Rework glass substrate management, drug management, environmental management, equipment management improvements. New Rework production line transformation. It greatly reduces the consumption of single glass substrate, and increases the rate of Rework quality from 50% to 85%. It saves a large amount of production cost for customers. The implementation method of this project provides valuable experience for peer equipment transformation, and also provides the basis for the topic of better value-added service for the introduction of high precision equipment into China.
【学位授予单位】：上海交通大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TN873.93

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