旋转对称结构微型壳体振动陀螺谐振结构加工工艺研究
发布时间：2018-08-21 08:01
【摘要】：旋转对称结构微型壳体振动陀螺具有精度高,带宽宽,动态范围大,品质因数高以及抗干扰等潜在优异的性能,引起了国内外学者广泛的研究兴趣。目前,国内相关方面的研究还比较少,与国外差距比较大。微型壳体振动陀螺制造的核心仍是谐振结构加工工艺问题,加工工艺的难易制约着微型壳体振动陀螺的发展。本文主要围绕着微型壳体振动陀螺谐振结构的加工工艺问题,研究了不同材料的微型壳体振动陀螺谐振结构的加工工艺,旨在探索出一种加工相对简单、工艺一致性较好的微型壳体振动陀螺加工工艺。本文主要从以下几个方面开展研究工作:1.介绍了微型壳体振动陀螺的主要结构形式和工作原理,并理论分析了基于静电驱动和电容检测的微型壳体振动陀螺的固有振型。2.分析了激光刻蚀技术的基本原理,研究了激光加工参数对单晶金刚石刻蚀质量的影响。基于激光刻蚀工艺,实现了单晶金刚石的微型壳体振动陀螺微杯形谐振结构的加工并分析了激光刻蚀加工谐振结构的技术特点。3.阐述了硅各向同性湿法腐蚀的基本原理,实现了硅半球面的加工。利用各向同性湿法腐蚀,实现了圆筒状陀螺谐振结构的加工并分析了硅各向同性湿法腐蚀加工谐振结构的技术特点。4.介绍了微壳体振动陀螺谐振结构的玻璃吹制工艺的基本原理。基于此,实现了微型壳体振动陀螺圆盒状谐振结构和微圆柱壳体谐振结构的加工并分析了玻璃吹制工艺加工谐振结构的技术特点。
[Abstract]:The vibratory gyroscope with rotating symmetric structure has many potential advantages such as high precision, wide bandwidth, wide dynamic range, high quality factor and anti-interference, etc., which has attracted extensive research interest of scholars at home and abroad. At present, the domestic related research is still relatively small, and the gap between foreign countries is relatively large. The core of micro shell vibration gyroscope is still the machining technology of resonant structure. The difficulty of machining technology restricts the development of micro shell vibration gyroscope. In this paper, the machining technology of vibration gyroscope resonator structure with different materials is studied, which aims to find out a relatively simple machining method. Micro shell vibration gyroscope machining technology with good consistency. This article mainly carries on the research work from the following several aspects: 1. This paper introduces the main structure and working principle of the micro shell vibration gyroscope, and theoretically analyzes the inherent vibration mode of the micro shell vibration gyroscope based on electrostatic drive and capacitance detection. The basic principle of laser etching technology is analyzed and the influence of laser processing parameters on the etching quality of single crystal diamond is studied. Based on laser etching technology, the fabrication of micro shell vibration gyro micro cup resonant structure of single crystal diamond is realized and the technical characteristics of laser etching are analyzed. The basic principle of isotropic wet etching of silicon is described. The cylindrical gyroscope resonant structure is fabricated by isotropic wet etching and the technical characteristics of silicon isotropic wet etching are analyzed. The basic principle of glass blowing technology for vibration gyro resonant structure of microshell is introduced. Based on this, the fabrication of circular box resonant structure of micro shell vibration gyroscope and resonant structure of micro cylindrical shell is realized. The technical characteristics of glass blowing process for machining resonant structure are analyzed.
【学位授予单位】：国防科学技术大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TN96;TP212
本文编号：2195070
[Abstract]:The vibratory gyroscope with rotating symmetric structure has many potential advantages such as high precision, wide bandwidth, wide dynamic range, high quality factor and anti-interference, etc., which has attracted extensive research interest of scholars at home and abroad. At present, the domestic related research is still relatively small, and the gap between foreign countries is relatively large. The core of micro shell vibration gyroscope is still the machining technology of resonant structure. The difficulty of machining technology restricts the development of micro shell vibration gyroscope. In this paper, the machining technology of vibration gyroscope resonator structure with different materials is studied, which aims to find out a relatively simple machining method. Micro shell vibration gyroscope machining technology with good consistency. This article mainly carries on the research work from the following several aspects: 1. This paper introduces the main structure and working principle of the micro shell vibration gyroscope, and theoretically analyzes the inherent vibration mode of the micro shell vibration gyroscope based on electrostatic drive and capacitance detection. The basic principle of laser etching technology is analyzed and the influence of laser processing parameters on the etching quality of single crystal diamond is studied. Based on laser etching technology, the fabrication of micro shell vibration gyro micro cup resonant structure of single crystal diamond is realized and the technical characteristics of laser etching are analyzed. The basic principle of isotropic wet etching of silicon is described. The cylindrical gyroscope resonant structure is fabricated by isotropic wet etching and the technical characteristics of silicon isotropic wet etching are analyzed. The basic principle of glass blowing technology for vibration gyro resonant structure of microshell is introduced. Based on this, the fabrication of circular box resonant structure of micro shell vibration gyroscope and resonant structure of micro cylindrical shell is realized. The technical characteristics of glass blowing process for machining resonant structure are analyzed.
【学位授予单位】：国防科学技术大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TN96;TP212
【引证文献】
相关硕士学位论文 前1条
1 卢坤;“酒杯状”微壳体振动陀螺结构设计与加工工艺研究[D];国防科学技术大学;2015年
，本文编号：2195070
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