电容式硅微陀螺接口ASIC芯片集成技术研究
发布时间：2018-09-04 15:54
【摘要】：与传统的陀螺仪相比，基于MEMS工艺和CMOS技术的微机械陀螺具有低成本轻体积低功耗高可靠性等特点，不仅在汽车电子医疗器械运动机械等民用领域需求广泛，而且在战术导弹微型飞行器等等军事领域也得到大量的应用随着应用范围的不断拓展，对电容式硅微陀螺系统提出了更高的要求 电容式硅微陀螺系统中接口ASIC芯片的集成技术需要解决如下关键问题：接口电路中驱动模态和检测模态都存在非线性，会对系统的灵敏度稳定性等关键性能产生影响；对于微机械陀螺驱动电路而言，影响驱动稳定性的重要因素是相位噪声，目前研究缺乏多噪声源相位噪声的分析以及优化手段；正交误差和失调误差等非理想因素是影响微机械陀螺性能提升的重要因素，而且正交误差的反馈信号的耦合也影响电路检测精度本文针对上述问题进行了微陀螺接口电路非线性闭环驱动多噪声源相位噪声模型正交误差和失调误差补偿等关键技术的深入研究 首先，本文通过理论分析对微陀螺接口电路各部分的非线性进行研究，微陀螺系统中驱动模态的非线性主要是由驱动电压到驱动位移的转化过程中产生，检测模态中的非线性主要是由检测位移到前级输出电压以及接口电路中电压信号的二次解调过程产生的，文中定性分析了包括驱动模态和检测模态引起非线性的原因，定量分析了二次解调电路中解调参考信号对系统非线性的影响针对相敏解调电路的正负传递特性不一致的问题进行了研究，提出了改进方案，并设计了高线性度的相敏解调电路 其次，，针对多噪声源对驱动模态相位噪声的影响，建立了多噪声源自激驱动电路相位噪声耦合模型，该模型得出微陀螺闭环驱动电路中的相位噪声主要影响源包括：接近直流的低频干扰驱动谐振频率附近的噪声驱动信号多次谐波处的噪声针对前级电荷放大器进行了噪声测试，并对驱动环路进行了噪声注入实验，实验得出接近直流部分为低频噪声和驱动谐振频率附近的噪声是主要影响因素，通过减小低频噪声可降低相位噪声对电荷放大器噪声模型进行了分析，得出了电路前级电荷放大器噪声参数的折中关系，设计了基于电容匹配技术的低噪声电荷放大器，降低了驱动环路的相位噪声，提高了驱动环路的频率稳定性 再次，为了解决微陀螺系统正交耦合误差的问题，在理论分析的基础上建立了消除正交误差的行为级模型，在该模型的指导下，提出了一种新颖的兼容无反馈电极的正交误差消除电路，该电路在有效消除正交误差的同时避免了信号耦合干扰增加等问题 最后，设计了基于频率调制原理的驱动电路，该电路可消除驱动信号对位移信号的同频耦合，同时兼容低Q值的陀螺结构设计了基于二次解调原理的检测电路设计了微陀螺接口ASIC芯片的模块，包括电容电压转换器滤波器移相器自动增益控制单元混频器电荷放大器相敏解调器等，对芯片进行了仿真版图设计流片芯片面积：5.05×3.7mm2，该芯片与敏感结构组成的微陀螺系统测试结果表明：量程为±800o/s，零位稳定性为30o/h，非线性度0.1%，噪声0.003/s/Hz1/2
[Abstract]:Compared with traditional gyroscopes, micromachined gyroscopes based on MEMS technology and CMOS technology have the characteristics of low cost, light volume, low power consumption and high reliability. They are not only widely used in civil fields such as automotive electronic medical devices and motion machinery, but also widely used in military fields such as tactical missile micro air vehicles. The development of capacitive silicon micromachined gyroscope system is further demanded.
The integration technology of interface ASIC chip in capacitive silicon micro-gyroscope system needs to solve the following key problems: the drive mode and the detection mode are nonlinear in the interface circuit, which will affect the sensitivity and stability of the system; for the driving circuit of micro-mechanical gyroscope, the important factor affecting the driving stability is Phase noise, the lack of multi-noise source phase noise analysis and optimization methods; orthogonal error and misalignment error and other non-ideal factors are important factors affecting the performance of micromachined gyroscopes, and the coupling of orthogonal error feedback signal also affects the circuit detection accuracy. In-depth study on the key technologies of phase noise model orthogonal error and offset error compensation for circuit nonlinear closed-loop driving multi-noise sources
Firstly, the non-linearity of the interface circuit of micro-gyroscope is studied by theoretical analysis. The non-linearity of the driving mode in micro-gyroscope system is mainly caused by the conversion from driving voltage to driving displacement. The non-linearity of the detection mode is mainly caused by the detection displacement to the front output voltage and the voltage signal in the interface circuit. This paper qualitatively analyzes the causes of nonlinearity including driving mode and detecting mode, quantitatively analyzes the influence of demodulation reference signal on system nonlinearity in secondary demodulation circuit, and studies the inconsistency between positive and negative transmission characteristics of phase-sensitive demodulation circuit, and puts forward an improved scheme. A phase sensitive demodulation circuit with high linearity is designed.
Secondly, aiming at the influence of multi-noise sources on the phase noise of driving modes, a phase noise coupling model of self-excited driving circuit with multi-noise sources is established. The model shows that the main influence sources of phase noise in the closed-loop driving circuit of micro-gyroscope include: the multiple harmonics of noise driving signal near the resonant frequency of low-frequency interference driving near DC The noise of the preamplifier is tested and the noise injection experiment of the driving loop is carried out. The results show that the noise near the DC part is low frequency noise and the noise near the driving resonant frequency is the main influencing factor. The noise model of the charge amplifier is analyzed by reducing the low frequency noise and the phase noise. The compromise relation between the noise parameters of the circuit preamplifier is obtained. A low noise charge amplifier based on capacitance matching technology is designed, which reduces the phase noise of the driving loop and improves the frequency stability of the driving loop.
Thirdly, in order to solve the problem of orthogonal coupling error of micro-gyroscope system, a behavior-level model for eliminating orthogonal error is established on the basis of theoretical analysis. Under the guidance of this model, a novel orthogonal error eliminating circuit compatible with no feedback electrode is proposed, which can effectively eliminate orthogonal error and avoid signal coupling. Interference increase
Finally, a driving circuit based on frequency modulation principle is designed, which can eliminate the same frequency coupling between driving signal and displacement signal, and is compatible with gyroscope structure with low Q value. A detection circuit based on the principle of secondary demodulation is designed to design ASIC chip module of micro-gyroscope interface, including capacitor voltage converter filter phase shifter automatic increase. The chip area is 5.05 *3.7 mm2. The test results of the micro-gyroscope system consisting of the chip and the sensitive structure show that the measurement range is +800o/s, the zero-position stability is 30o/h, the nonlinearity is 0.1%, and the noise is 0.003/s/Hz 1/2.
【学位授予单位】：哈尔滨工业大学
【学位级别】：博士
【学位授予年份】：2014
【分类号】：TN96;TP212
[Abstract]:Compared with traditional gyroscopes, micromachined gyroscopes based on MEMS technology and CMOS technology have the characteristics of low cost, light volume, low power consumption and high reliability. They are not only widely used in civil fields such as automotive electronic medical devices and motion machinery, but also widely used in military fields such as tactical missile micro air vehicles. The development of capacitive silicon micromachined gyroscope system is further demanded.
The integration technology of interface ASIC chip in capacitive silicon micro-gyroscope system needs to solve the following key problems: the drive mode and the detection mode are nonlinear in the interface circuit, which will affect the sensitivity and stability of the system; for the driving circuit of micro-mechanical gyroscope, the important factor affecting the driving stability is Phase noise, the lack of multi-noise source phase noise analysis and optimization methods; orthogonal error and misalignment error and other non-ideal factors are important factors affecting the performance of micromachined gyroscopes, and the coupling of orthogonal error feedback signal also affects the circuit detection accuracy. In-depth study on the key technologies of phase noise model orthogonal error and offset error compensation for circuit nonlinear closed-loop driving multi-noise sources
Firstly, the non-linearity of the interface circuit of micro-gyroscope is studied by theoretical analysis. The non-linearity of the driving mode in micro-gyroscope system is mainly caused by the conversion from driving voltage to driving displacement. The non-linearity of the detection mode is mainly caused by the detection displacement to the front output voltage and the voltage signal in the interface circuit. This paper qualitatively analyzes the causes of nonlinearity including driving mode and detecting mode, quantitatively analyzes the influence of demodulation reference signal on system nonlinearity in secondary demodulation circuit, and studies the inconsistency between positive and negative transmission characteristics of phase-sensitive demodulation circuit, and puts forward an improved scheme. A phase sensitive demodulation circuit with high linearity is designed.
Secondly, aiming at the influence of multi-noise sources on the phase noise of driving modes, a phase noise coupling model of self-excited driving circuit with multi-noise sources is established. The model shows that the main influence sources of phase noise in the closed-loop driving circuit of micro-gyroscope include: the multiple harmonics of noise driving signal near the resonant frequency of low-frequency interference driving near DC The noise of the preamplifier is tested and the noise injection experiment of the driving loop is carried out. The results show that the noise near the DC part is low frequency noise and the noise near the driving resonant frequency is the main influencing factor. The noise model of the charge amplifier is analyzed by reducing the low frequency noise and the phase noise. The compromise relation between the noise parameters of the circuit preamplifier is obtained. A low noise charge amplifier based on capacitance matching technology is designed, which reduces the phase noise of the driving loop and improves the frequency stability of the driving loop.
Thirdly, in order to solve the problem of orthogonal coupling error of micro-gyroscope system, a behavior-level model for eliminating orthogonal error is established on the basis of theoretical analysis. Under the guidance of this model, a novel orthogonal error eliminating circuit compatible with no feedback electrode is proposed, which can effectively eliminate orthogonal error and avoid signal coupling. Interference increase
Finally, a driving circuit based on frequency modulation principle is designed, which can eliminate the same frequency coupling between driving signal and displacement signal, and is compatible with gyroscope structure with low Q value. A detection circuit based on the principle of secondary demodulation is designed to design ASIC chip module of micro-gyroscope interface, including capacitor voltage converter filter phase shifter automatic increase. The chip area is 5.05 *3.7 mm2. The test results of the micro-gyroscope system consisting of the chip and the sensitive structure show that the measurement range is +800o/s, the zero-position stability is 30o/h, the nonlinearity is 0.1%, and the noise is 0.003/s/Hz 1/2.
【学位授予单位】：哈尔滨工业大学
【学位级别】：博士
【学位授予年份】：2014
【分类号】：TN96;TP212
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1 莫冰;刘晓为;谭晓昀;尹亮;丁学伟;汤佳郁;;双电容接口式微机械陀螺的信号检测方法[J];传感技术学报;2006年05期
2 刘晓为;莫冰;王超;谭晓昀;许晓巍;齐向昆;;微机械陀螺ASIC接口电路设计[J];传感技术学报;2006年05期
3 尹韬;杨海钢;张
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