非对称光束干涉制备二维微纳光子结构研究

发布时间：2018-03-31 07:22

本文选题：多光束干涉　切入点：非对称　出处：《物理学报》2017年21期

【摘要】：研究了基于不同偏振组合的非对称4束和5束光干涉制备二维微纳光子结构.通过改变光束的参数组合获得了枝节状、波形状等结构.在非对称光束干涉中,光束的构型和偏振改变了波矢差分布,从而改变晶格形貌和对比度.利用CHP-C感光胶开展了全息光刻实验制备,获得了与模拟一致的光子结构.该研究为制备新颖光子结构提供了有效途径,此类光子结构还可以为制备不同类型的金属点阵结构提供模板,对新型光子器件的制备和应用研究具有一定的促进作用.
[Abstract]:Two dimensional micro and nano photonic structures based on asymmetric 4 beams and 5 beams of light interference with different polarization combinations are studied. The branches and wave shapes are obtained by changing the parameter combination of the beams. The configuration and polarization of the beam change the distribution of the wave vector, thus changing the morphology and contrast of the crystal lattice. The holographic lithography experiment was carried out by using the CHP-C photoresist. Photonic structures consistent with the simulation are obtained. This study provides an effective way to prepare novel photonic structures, which can also provide templates for the preparation of different types of metal lattice structures. It can promote the preparation and application of new photonic devices.
【作者单位】：青岛科技大学数理学院;山东省新型光电材料与技术工程实验室;
【基金】：山东省高等学校科技计划(批准号:J14LJ06) 山东省自然科学基金(批准号:ZR2014FP012) 国家自然科学基金(批准号:11274189,11504194)资助的课题~~
【分类号】：TN256

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