激光超衍射加工机理与研究进展

发布时间：2018-04-02 06:00

本文选题：超衍射极限　切入点：激光微纳加工　出处：《物理学报》2017年14期

【摘要】：随着纳米科技和微纳电子器件的发展,制造业对微纳加工技术的要求越来越高.激光加工技术是一种绿色先进制造技术,具有巨大的发展潜力,己广泛应用于不同的制造领域.为实现低成本、高效率、大面积尤其是高精度的激光微纳加工制造,研究和发展激光超衍射加工技术具有十分重要的科学意义和应用价值.本文首先阐述了基于非线性效应的远场激光直写超衍射加工技术的原理与国内外发展状况,包括激光烧蚀加工技术、激光诱导改性加工技术和多光子光聚合加工技术等;然后介绍了几种基于倏逝波的近场激光超衍射加工技术,包括扫描近场光刻技术、表面等离子激元光刻技术等新型超衍射激光近场光刻技术的机理与研究进展;最后对激光超衍射加工中存在的问题及未来发展方向进行了讨论.
[Abstract]:With the development of nanotechnology and micro-nano electronic devices, the manufacturing industry is demanding more and more micro-nano processing technology.Laser processing technology is a kind of green advanced manufacturing technology, which has great development potential and has been widely used in different manufacturing fields.In order to achieve low cost, high efficiency, large area, especially high precision laser micro and nano machining, the research and development of laser superdiffraction processing technology has very important scientific significance and application value.In this paper, the principle and development of far-field laser direct-writing superdiffraction processing based on nonlinear effect are introduced, including laser ablation, laser-induced modification and multi-photon photopolymerization.Then several near-field laser superdiffraction processing techniques based on evanescent wave are introduced, including scanning near-field lithography technology, surface plasma excitation lithography technology and other new super-diffraction laser near-field lithography technology mechanism and research progress.Finally, the problems existing in laser superdiffraction processing and its future development are discussed.
【作者单位】：南开大学物理科学学院泰达应用物理研究院弱光非线性光子学教育部重点实验室;青岛大学物理科学学院;
【基金】：国家重点基础研究发展计划(批准号:2013CB328702) 国家自然科学基金(批准号:11674182) 天津市自然科学基金(批准号:17JCYBJC16700) 111计划(批准号:B07013) 教育部长江学者和创新团队发展计划(批准号:IRT_13R29) 山西大学极端光学协同创新中心资助的课题~~
【分类号】：TN249

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