基于光学傅里叶变换的周期性微结构缺陷检测

发布时间：2018-05-06 11:48

本文选题：傅里叶变换 + 大视场　；参考：《光学精密工程》2017年07期

【摘要】：为了实现大视场周期性微结构缺陷检测,提出了一种基于光学傅里叶变换(FT)的大视场周期性微结构缺陷检测方法,并搭建相关实验系统进行实验验证。首先,对周期性微结构的像进行二维快速傅里叶变换,获取周期性微结构的空间频谱;然后,选取一级衍射斑点中的一个斑点做快速傅里叶逆变换,得到周期性微结构的幅值分布图;最后,根据幅值分布图中的幅值突变位置确定缺陷的位置以及根据幅值突变的剧烈程度来定性地判断缺陷处的点偏离原来位置的位移。实验结果表明:该套系统的测量视场能达到1.5mm×1.5mm,测量分辨率能达到0.5μm以上,在保证分辨率达到要求的前提下,大大地提高了检测视场,能够快速、高效、便捷地在大视场下对周期性微结构进行缺陷检测。
[Abstract]:In order to detect periodic microstructural defects in large field of view, a novel method based on optical Fourier transform (FTFT) is proposed to detect periodic microstructural defects in large field of view. Firstly, two-dimensional fast Fourier transform (FFT) is used to obtain the spatial spectrum of periodic microstructures, and then one of the first order diffraction spots is selected for inverse FFT. The amplitude distribution map of periodic microstructures is obtained. Finally, the location of defects is determined according to the abrupt position of amplitude in the amplitude distribution map and the displacement of the point deviating from the original position is judged qualitatively according to the intensity of amplitude mutation. The experimental results show that the measuring field of view of the system can reach 1.5mm 脳 1.5mm and the resolution of measurement can reach more than 0.5 渭 m. On the premise of ensuring the resolution to meet the requirements, the system can greatly improve the detection field of view, and can be fast and efficient. It is convenient to detect periodic microstructures in large field of view.
【作者单位】：北京信息科技大学光电测试技术北京市重点实验室;
【基金】：国家自然科学基金资助项目(No.61605011) 教育部创新团队项目
【分类号】：O438.2

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