高电荷态锡离子极真空紫外波段自吸收光谱轮廓的细致分析

发布时间：2018-05-14 12:18

本文选题：激光等离子体 + 高电荷态离子　；参考：《中国科学:物理学力学天文学》2017年12期

【摘要】：等离子体动力学模拟是一种非常有效的等离子体状态诊断和光谱分析方法,已被广泛应用于激光等离子体光谱的解释和演化分析中.本文基于流体动力学方程和辐射输运方程,并结合稳态的碰撞辐射模型,提出了一种简化的能够分析模拟中高Z元素高电荷态离子极真空紫外(Extreme Ultraviolet,EUV)波段光谱的辐射流体动力学模型,并成功应用于激光产生的锡等离子体EUV光谱的分析和模拟.结果表明,理论模拟光谱与激光功率密度为1.90×10~(11)?W/cm~2的实验光谱之间具有良好的一致性.通过比较Sn~(7+) Sn~(11+)离子的4d-4f,4p-4d和4d-5p,5f跃迁阵列的发射轮廓和自吸收轮廓,明确了不透明度效应对发射光谱轮廓的影响,成功解释了13.5?nm附近自吸收带和自吸收峰的成因.相关研究预期能够为极真空紫外辐射在光刻、计量、生物成像等领域的应用研究提供参考.
[Abstract]:Plasma dynamics simulation is a very effective method for plasma state diagnosis and spectral analysis, which has been widely used in the interpretation and evolution analysis of laser plasma spectrum. This paper is based on the hydrodynamic equation and the radiation transport equation, combined with the steady-state collision radiation model. In this paper, a simplified radiative hydrodynamic model is proposed to simulate the spectra of high charge state ion ions in the high Z state. The model has been successfully applied to the analysis and simulation of the EUV spectra of the laser generated tin plasma. The results show that there is a good agreement between the theoretical simulated spectra and the experimental spectra with a laser power density of 1.90 脳 10~(11)?W/cm~2. By comparing the emission profile and the self-absorption profile of 4d-4fn4d and 4d-5pO5f transition arrays of Sn~(11 (Sn~(7) ions, the effect of opacity on the emission spectra profile is clarified, and the causes of the self-absorption bands and self-absorption peaks near 13.5?nm are explained successfully. The related research is expected to provide a reference for the application of extreme vacuum ultraviolet radiation in lithography, metrology, biological imaging and other fields.
【作者单位】：西北师范大学物理与电子工程学院甘肃省原子分子物理与功能材料重点实验室;
【基金】：国家自然科学基金(编号:11064012,11364037,11274254,U1332206,11564037) 甘肃省高等学校基本科研业务费甘肃省自然科学基金(编号:1308RJZA166,1104WCGA186)资助
【分类号】：O53

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