基于正交误差对准的MEMS陀螺测控电路设计

发布时间：2018-03-23 05:23

本文选题：相干检测　切入点：正交误差　出处：《湖南大学学报(自然科学版)》2017年10期 　论文类型：期刊论文

【摘要】：传统MEMS(Micro-Electro-Mechanical System)陀螺的相干检测基于驱动位移和科氏位移的相位关系,依赖于陀螺的工作模式,解调载波相位抖动大,不易相位对准.为解决此问题,本文提出了一种基于正交误差对准的不依赖陀螺工作模式的相干解调系统.解调载波取自驱动电路的PLL(Phase-Locked Loop)输出,相位抖动小,仅作载波使用,不代表驱动位移信息.检测通路插入移相器,使正交误差相位滞后解调载波90°,则科氏位移信号与解调载波同相,完成检测.为验证该方法,本文研究了陀螺器件与接口电路之间的信号传递特性并进行建模,设计了锁相环、C/V(Capacitance/Voltage)转换、移相器等核心电路,实现了一款完整的MEMS陀螺测控电路.测试结果表明:陀螺驱动正常,检测正确,刻度因数为1.415mV/(°.s),零偏不稳定度为108°/h.结果验证了该检测方法的有效性,并为后续进一步提升性能提供了基础.该检测方法也适用于其他振动式MEMS陀螺的测控系统.
[Abstract]:The traditional MEMS (Micro-Electro-Mechanical System) coherent detection of the phase relationship between gyro drive displacement and Coriolis displacement based on gyro depends on the working mode, the demodulation of carrier phase jitter, phase alignment is not easy. In order to solve this problem, this paper presents a coherent demodulation system of orthogonal error alignment does not depend on the working mode based on gyro. From the carrier demodulation driving circuit for PLL (Phase-Locked Loop) output, low phase jitter, only the carrier, does not represent the displacement information. Detection channel insertion phase shifter, the quadrature error phase lag demodulation carrier 90 degrees, while the Coriolis displacement signal demodulation and carrier phase, complete detection. The method is validated in this paper. Study on the signal between the gyro and the interface circuit transmission characteristics and modeling, design of phase locked loop (Capacitance/Voltage), C/V conversion, phase shifter, core circuit, realization A complete MEMS gyro control circuit. The test results show that the drive is normal, the correct detection, the scale factor is 1.415mV/ (.S), zero bias instability is 108 DEG /h. results verify the effectiveness of the detection method, and further improve the performance for the follow-up to provide a foundation. This method also measure and control system applicable to other vibrating MEMS gyroscope.

【作者单位】：中国科学院微电子研究所;中国科学院大学;
【基金】：国家自然科学基金资助项目(61501453)~~
【分类号】：TN96

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