MEMS谐振器及陀螺仪的设计、加工与测试

发布时间：2018-05-12 01:15

  本文选题：MEMS + 谐振器　； 参考：《浙江大学》2017年硕士论文

【摘要】：随着微机电系统(MEMS,microelectromechanical systems)技术的发展,微谐振器和陀螺仪越来越受到人们的关注。利用MEMS技术得到的微传感器具有成本低、尺寸小、功耗小等特点。在导航、消费电子等民用领域,航空航天以及未来高科技战场上拥有广阔的发展和市场前景。谐振器作为陀螺仪的关键部件,性能直接影响陀螺仪的工作。本论文研究基于硅和金刚石的MEMS谐振器及陀螺仪的设计、加工与测试。本论文将通过以下五章介绍研究的主要内容。第一章主要介绍了 MEMS谐振器和谐振陀螺仪应用领域,研究现状和工作原理。MEMS谐振器可以用在振荡器上,MEMS谐振陀螺仪大致可以分为框架式、音叉式、振动环式、多轴输入式、解耦式五种,并按此分类介绍了国内外研究现状。最后介绍了本课题的研究内容。第二章设计了 一个基于硅的MEMS的32kHz谐振器和DETF谐振器,详细介绍了两个谐振器的工作原理,确定了器件的结构设计,用ANSYS建模仿真得到两个器件的谐振频率。设计了器件的加工工艺,得到器件。搭建了真空测试实验平台,测试了两个谐振器的谐振频率。第三章主要介绍了金刚石材料做MEMS器件的优势并设计的4个金刚石MEMS谐振器(半球和半环谐振器、32kHz谐振器和DETF谐振器)和1个MEMS谐振陀螺仪(振动环式),详细介绍了各个器件的工作原理,确定了器件的结构设计,最后用ANSYS建模仿真得到每个器件的理论谐振频率。第四章设计了金刚石MEMS半球和半环谐振器的加工工艺,确定影响HNA各向同性刻蚀的6个因素,设计了一个旋转刻蚀装置来刻蚀半球和半环凹模。用Matlab分析凹模的圆度。两次沉积金刚石,并且检测了超纳米金刚石薄膜的拉曼光谱。设计了金刚石MEMS平面器件加工工艺,并且确定了各加工步骤的参数,自主加工得到器件。最后搭建激光多普勒检测DETF谐振器的实验平台检测硅基和金刚石DETF的谐振频率和计算品质因数Q。第五章对本论文的研究内容简单总结,分析在研究过程中存在的问题和不足,对未来的研究提出建议和展望。
[Abstract]:With the development of MEMS microelectromechanical systems, more and more attention has been paid to microresonators and gyroscopes. The micro sensor based on MEMS technology has the advantages of low cost, small size and low power consumption. In navigation, consumer electronics and other civil areas, aerospace and the future of high-tech battlefield has a broad development and market prospects. As the key component of gyroscope, the performance of resonator directly affects the work of gyroscope. This paper studies the design, processing and testing of MEMS resonator and gyroscope based on silicon and diamond. This thesis will introduce the main contents of the research through the following five chapters. The first chapter mainly introduces the application field of MEMS resonator and resonant gyroscope. The research status and working principle of MEMS resonator can be divided into frame type, tuning fork type, vibration ring type, multi-axis input type. There are five kinds of decoupling, and according to this classification, the present situation of research at home and abroad is introduced. Finally, the research content of this topic is introduced. In chapter 2, a 32kHz resonator and a DETF resonator based on silicon MEMS are designed. The working principle of the two resonators is introduced in detail, and the structural design of the devices is determined. The resonant frequencies of the two devices are obtained by ANSYS modeling and simulation. The fabrication process of the device is designed and the device is obtained. A vacuum test platform was set up and the resonant frequencies of two resonators were tested. Chapter 3 mainly introduces the advantages of diamond materials as MEMS devices and designs four diamond MEMS resonators (hemispherical and semicyclic resonators, 32kHz resonators and DETF resonators) and a MEMS resonant gyroscope (vibrating ring type gyroscope, detailed introduction). The working principle of each device is introduced. Finally, the theoretical resonance frequency of each device is obtained by ANSYS modeling and simulation. In chapter 4, the fabrication process of diamond MEMS hemispherical and semi-ring resonators is designed. Six factors affecting HNA isotropic etching are determined, and a rotating etching device is designed to etch hemispherical and semi-ring concave dies. The roundness of the die is analyzed by Matlab. The Raman spectra of ultrananocrystalline diamond films were measured. The machining process of diamond MEMS planar device is designed, and the parameters of each processing step are determined. Finally, an experimental platform for laser Doppler detection of DETF resonators is set up to detect the resonant frequency and quality factor of silicon based and diamond DETF. The fifth chapter summarizes the research content of this paper, analyzes the problems and shortcomings in the research process, and puts forward suggestions and prospects for future research.
【学位授予单位】：浙江大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN96;TH-39;TN751.2

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