硅微机械陀螺仪温度补偿方法的研究现状
发布时间：2019-06-08 11:49
【摘要】：综述了硅微机械陀螺仪温度补偿方法的研究现状。介绍了陀螺仪的基本原理,并分析了陀螺仪的温度特性。分别对温度控制、器件设计和算法补偿三种温度补偿方法进行了原理和结果分析,总结了各种方法的优势与不足。介绍了算法补偿中两种常用的温度误差模型构建方法,算法补偿既符合小体积、低成本的设计理念,又能有效提升陀螺仪的温度稳定性,但复杂的算法需要强大的内存支撑,系统的响应速度亦会受到影响,因此在算法的优化设计方面仍有巨大的研究潜力和空间。随着陀螺仪数字化进程的不断推进,温度误差模型构建的标准化方法以及优化的算法是未来进一步的发展方向。
[Abstract]:The research status of temperature compensation methods for silicon micromachined gyroscopes is reviewed. The basic principle of gyroscope is introduced, and the temperature characteristics of gyroscope are analyzed. The principle and results of three temperature compensation methods, temperature control, device design and algorithm compensation, are analyzed, and the advantages and disadvantages of these methods are summarized. This paper introduces two commonly used temperature error model construction methods in algorithm compensation. The algorithm compensation not only accords with the design concept of small volume and low cost, but also can effectively improve the temperature stability of gyroscope, but the complex algorithm needs strong memory support. The response speed of the system will also be affected, so there is still great research potential and space in the optimization design of the algorithm. With the development of gyroscope digitization, the standardization method and optimization algorithm of temperature error model are the further development direction in the future.
【作者单位】： 中国科学院半导体研究所半导体集成技术工程研究中心;中国科学院大学材料科学与光电技术学院;中国科学院大学电子电气与通信工程学院;
【基金】：国家自然科学基金资助项目(61274001,61234007,61504130)
【分类号】：TN96
本文编号：2495260
[Abstract]:The research status of temperature compensation methods for silicon micromachined gyroscopes is reviewed. The basic principle of gyroscope is introduced, and the temperature characteristics of gyroscope are analyzed. The principle and results of three temperature compensation methods, temperature control, device design and algorithm compensation, are analyzed, and the advantages and disadvantages of these methods are summarized. This paper introduces two commonly used temperature error model construction methods in algorithm compensation. The algorithm compensation not only accords with the design concept of small volume and low cost, but also can effectively improve the temperature stability of gyroscope, but the complex algorithm needs strong memory support. The response speed of the system will also be affected, so there is still great research potential and space in the optimization design of the algorithm. With the development of gyroscope digitization, the standardization method and optimization algorithm of temperature error model are the further development direction in the future.
【作者单位】： 中国科学院半导体研究所半导体集成技术工程研究中心;中国科学院大学材料科学与光电技术学院;中国科学院大学电子电气与通信工程学院;
【基金】：国家自然科学基金资助项目(61274001,61234007,61504130)
【分类号】：TN96
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