柔性薄膜光栅数字化制作及光谱检测应用

发布时间：2017-12-28 13:30

本文关键词：柔性薄膜光栅数字化制作及光谱检测应用　出处：《实验室研究与探索》2016年09期 　论文类型：期刊论文

【摘要】：建立了数字微镜(DMD)数字化制作系统,通过光栅数字掩模生成、曝光、显影、PDMS复制、PDMS固化,制作了PDMS柔性薄膜光栅。将该柔性薄膜光栅应用于光栅光谱仪原理系统中,先对系统进行定标,再测量待测光源波长,波长测量相对偏差为2.10%。为了评估光栅的制作质量,采用光栅光谱仪原理系统对光栅周期进行测量,相对偏差为2.15%;利用光学轮廓仪对光栅二维、三维形貌进行检测,光栅周期相对偏差为1.45%,光栅的整体轮廓光滑,均匀性较好。制作实验及测量结果表明,基于DMD的数字化制作技术为柔性微结构及器件的制作提供了一条简单、高效、低成本、高精度制作的新途径。
[Abstract]:The digital micromirror (DMD) digital manufacturing system is established. Through the grating digital mask generation, exposure, development, PDMS replication and PDMS curing, PDMS flexible thin film grating is made. The flexible thin film grating is applied to the principle system of grating spectrometer. The system is calibrated first, then the wavelength of the light source to be measured is measured. The relative deviation of wavelength measurement is 2.10%. In order to make the quality evaluation of the grating, the measurement of grating period grating spectrometer system principle, the relative deviation is 2.15%; to detect the grating of 2D and 3D morphology by optical profilometry, grating period relative deviation is 1.45%, the overall outline of the grating is smooth, good uniformity. The experiment and measurement results show that the digital manufacturing technology based on DMD provides a simple, efficient, low-cost and high-precision way for making flexible microstructures and devices.
【作者单位】：南昌航空大学大学物理实验中心;
【基金】：国家自然科学基金(61464008) 江西省自然科学基金(20142BAB211003)
【分类号】：TH744.1
【正文快照】： 0引言随着柔性高分子材料的研究和聚合物材料的发展,柔性微结构及器件以其耐用性好、质量轻、可弯曲等优点,广泛应用于高亮度有机发光器件[1-3]、传感器[4-5]、生物芯片[6]和聚合物MEMS[7]等新兴领域。柔性微结构的传统加工方法,如电子束直写[8]、离子束光刻[9]、激光直写[10]

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