大型光学表面纳米精度制造

发布时间：2017-12-30 22:36

本文关键词：大型光学表面纳米精度制造　出处：《国防科技大学学报》2015年06期 　论文类型：期刊论文

【摘要】：纳米精度光学表面在光刻技术、同步辐射、空间观测和惯约聚变等领域有重大需求。随着装备性能需求的不断提升,这些光学系统对光学零件面形精度和表面质量的要求几乎接近于物理极限,对光学制造技术提出了更高挑战,使光学制造成为纳米制造技术的发展前沿。通过攻克纳米量级材料去除的稳定性、复杂曲面可控补偿和装备运动轴性能设计等关键问题,掌握了以磁流变和离子束抛光技术为代表的可控柔体抛光技术,利用自主研发的抛光制造装备和工艺实现了典型光学零件的纳米精度制造,为国家相关科技项目的顺利实施提供有力的制造技术支撑。
[Abstract]:Nano-precision optical surfaces have great demand in lithography, synchrotron radiation, space observation and inertial fusion. The requirements of these optical systems for the surface shape accuracy and surface quality of optical parts are close to the physical limit, which poses a higher challenge to the optical manufacturing technology. Optical manufacturing has become the development frontier of nano-manufacturing technology. The key issues such as the stability of nanoscale material removal, the controllable compensation of complex surfaces and the performance design of moving axis of equipment are solved. The controllable flexible body polishing technology represented by magnetorheological and ion beam polishing technology is mastered. The nano precision manufacturing of typical optical parts is realized by using the polishing equipment and process developed by ourselves. To provide a strong manufacturing technology support for the smooth implementation of national related science and technology projects.
【作者单位】：国防科技大学机电工程与自动化学院;超精密加工技术湖南省重点实验室;
【基金】：国家自然科学基金资助项目(51275521) 新世纪优秀人才资助计划项目(NCET-12-0144)
【分类号】：TH74
【正文快照】： 现代光学零件具有大口径、(亚)纳米精度、形状复杂、表面低损伤等特点,在空间观测、微电子制造、惯约聚变、同步辐射等重大光学工程中有着广泛应用,其制造水平直接影响国家的核心竞争力。光学零件高端加工技术和装备也被美国等西方发达国家视为战略资源,严格限制出口。因此,开

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