差动式迈克尔逊干涉纳米位移测量方法研究

发布时间：2018-01-04 10:12

本文关键词：差动式迈克尔逊干涉纳米位移测量方法研究　出处：《浙江理工大学》2015年硕士论文　论文类型：学位论文

【摘要】：随着精密加工、微电子等行业的快速发展，，对高精度位移测量技术的需求越来越大，性能要求也越来越高。本文依托国家自然科学基金(NO.51205365)，设计了一种差动式迈克尔逊干涉纳米位移测量方法，并对测量方法的各项关键技术进行了研究，通过搭建完整的测量系统，最终实现纳米级精度的位移测量。论文介绍了国内外纳米位移测量技术的研究现状，提出了一种差动式迈克尔逊干涉纳米位移测量方法，对差动式迈克尔逊干涉纳米位移测量的原理进行了详细的介绍，对测量系统的光路结构进行了设计，对系统机械支撑结构进行设计与有限元受力分析；设计了信号预处理电路与电压转化电路，用于改善干涉信号质量以及调整信号电压范围；设计了高精度的干涉信号相位差测量方法，并对相位差测量精度与分辨率进行了实验验证；设计了相位差测量速度补偿方法，对相位差测量过程中速度变化引起的误差进行了分析与补偿；对大数计数的测量原理进行了介绍，并对参考镜移动方向判断方法进行了设计；运用C语言对DSP进行了软件设计，运用VB设计了上位机的系统控制软件。为验证本文所构建的差动式迈克尔逊干涉纳米位移测量系统的可行性与有效性，搭建了实验平台，分别进行了以下实验：(1)相位差测量补偿对比实验，分别以50nm、200nm为步长进行了对比位移测量实验，步长为50nm时，补偿后测量误差的标准偏差由1.0108nm减小为0.5686nm，误差平均偏差由0.7648nm减小为0.4616nm；步长为200nm时，补偿后测量误差标准偏差由1.4188nm减小为0.5687nm，误差平均偏差由1.1115nm减小为0.4838nm。(2)小数计数位移测量实验，分别进行了5nm、10nm、20nm、50nm步长的位移测量实验，测量误差的标准偏差分别为0.4697nm、0.6317nm、0.7594nm、0.6644nm。(3)大数计数位移测量时实验，分别在正反向下进行了验证实验，以0.5μm为步长，在0-7μm的范围内验证大数计数的准确性，结果为大数计数误差均小于半个波长，与干涉条纹位移测量理论相符，大数计数正确。(4)大小数结合位移测量实验，分别在1μm与7μm下进行了重复性位移测量实验，测量的误差标准偏差分别为1.3199nm与0.9184nm，平均偏差分别为1.1057nm与0.9179nm。上述实验表明本文测量方法能够实现纳米精度位移测量，并且具有良好的可靠性与稳定性。
[Abstract]:With the rapid development of precision machining, microelectronics and other industries, the demand for high-precision displacement measurement technology is increasing. The performance requirements are becoming higher and higher. A differential Michelson interferometric nano-displacement measurement method is designed based on the National Natural Science Foundation of China (NSFC) no. 51205365. The key technologies of the measurement method are studied, and the displacement measurement with nanometer precision is finally realized by building a complete measuring system. This paper introduces the research status of nano-displacement measurement technology at home and abroad, and proposes a differential Michelson interferometric nano-displacement measurement method. The principle of differential Michelson interferometric nano-displacement measurement is introduced in detail. The optical structure of the measurement system is designed, and the mechanical support structure of the system is designed and analyzed by finite element method. The signal preprocessing circuit and the voltage conversion circuit are designed to improve the interference signal quality and adjust the voltage range of the signal. The phase difference measurement method of high precision interference signal is designed, and the precision and resolution of phase difference measurement are verified by experiment. The velocity compensation method of phase difference measurement is designed, and the error caused by velocity change in phase difference measurement is analyzed and compensated. The measuring principle of large number counting is introduced, and the method of determining the moving direction of reference mirror is designed. C language is used to design the software of DSP and VB is used to design the system control software of upper computer. In order to verify the feasibility and effectiveness of the differential Michelson interferometric nanoscale displacement measurement system, an experimental platform was set up, and the following experiments were carried out respectively. The displacement measurement experiments were carried out with the step size of 50nm ~ 200nm respectively. When the step size is 50nm, the standard deviation of measurement error after compensation is reduced from 1.0108nm to 0.5686nm. The average error deviation was reduced from 0.7648 nm to 0.4616 nm. When the step size is 200nm, the standard deviation of measurement error is reduced from 1.4188nm to 0.5687nm. The average error deviation was reduced from 1.1115nm to 0.4838nm.m-2). The standard deviation of measurement error is 0.4697 nm ~ 0.6317 nm ~ (-1) ~ 0.7594nm, respectively. When measuring the displacement of large number count, the experiments were carried out in both positive and negative direction. The accuracy of large number counting was verified in the range of 0-7 渭 m with 0.5 渭 m as step. The results show that the error of large number counting is less than half wavelength, which is consistent with the theory of interference fringes displacement measurement, and the large number count is correct. The repeatable displacement measurement experiments were carried out at 1 渭 m and 7 渭 m, respectively. The error standard deviations were 1.3199 nm and 0.9184 nm, respectively. The average deviations are 1.1057nm and 0.9179nmrespectively. The experimental results show that the proposed method can realize the displacement measurement with nanometer precision and has good reliability and stability.
【学位授予单位】：浙江理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TH744.3;TP274

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