高精度角位移平台的研制及误差补偿

发布时间：2018-01-08 08:40

本文关键词：高精度角位移平台的研制及误差补偿　出处：《仪器仪表学报》2016年05期 　论文类型：期刊论文

【摘要】：在拉曼光谱仪中,要求承载分光元件转动的角位移平台在具备较大的转动范围、较高的转角分辨率和转角定位精度的同时还具备较快的转动速度,传统的几种驱动方式很难同时满足上述所有要求。有鉴于此,设计了一种采用力矩电机直接驱动技术的高精度角位移平台。一般控制方法的控制精度在很大程度上依赖于反馈元件的测量精度,为了突破反馈元件测量精度对整个控制精度的影响,采用了一种更为精确的误差补偿校正技术,并搭建了误差测量装置,将测得的绝对转角误差在控制器中通过一定的控制算法加以有效的补偿。最后,对结构设计和误差补偿校正的效果进行了实验检测。结果显示:当测量步距为1°时,双向绝对定位精度优于1.008″;当测量步距为10°时,双向绝对定位精度为0.648″;回转轴系的轴向晃动误差小于±5″。以上结果验证了该角位移平台具有机械精度高、转角分辨率高、定位准确等技术优势,能够满足拉曼光谱仪等相关仪器的使用需求。
[Abstract]:In the Raman spectrometer, bearing light splitting element rotating angular displacement platform with large rotation range, high angle resolution and angular positioning precision at the same time also has the high rotation speed, several traditional driving mode is difficult to meet all the above requirements. Therefore, the design of a high precision angular displacement of the platform torque motor direct drive technology. The measurement precision control precision control method greatly depends on the feedback element, in order to break through the element influence on the measurement accuracy of feedback control accuracy, a more accurate error compensation technology, and set up the error measuring device, the absolute angular error measurement in the controller through a control algorithm to be compensated effectively. Finally, the structure design and error compensation effect was experimentally. Test. The results showed that when the measurement step is 1 degrees, two absolute positioning accuracy is superior to 1.008 "; when the measuring step is 10 degrees, two absolute positioning precision is 0.648"; the axial shaking error of spindle is less than 5 ". The above results show that the angular displacement platform with high precision machinery. The angle of high resolution, accurate positioning and other technical advantages, can meet the use of Raman spectrometer and other related equipment needs.

【作者单位】：中国科学院长春光学精密机械与物理研究所;中国科学院大学;吉林大学机械科学与工程学院;
【基金】：国家重大科学仪器设备开发专项(2014YQ120351) 国家重大科研装备研制项目(ZDYZ2008-1) 国家重点基础研究发展计划(973)(2014CB049500) 吉林省科技发展计划(20140204075GX)项目资助
【分类号】：TH744.1
【正文快照】： 1引言高精度的角度位移平台在精密机械、光谱仪器、光电设备、高档数控机床等许多场合都有着非常广泛的应用。在拉曼光谱仪、单色仪等光学仪器中,作为分光元件的棱镜或光栅需绕通过回转中心的轴线做某些特定规律的回转运动,仪器波长与分光元件转角之间具有一定的函数关系[1-3]

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