基于色差共焦原理的透镜中心厚度测量设备的研制

发布时间：2018-01-28 08:14

本文关键词： 透镜中心厚度色差共焦原理设备研制系统设计　出处：《中国科学院研究生院(长春光学精密机械与物理研究所)》2015年硕士论文　论文类型：学位论文

【摘要】：透镜应用广泛,而透镜中心厚度是透镜的一个重要参数,其对透镜的焦距以及光学系统的成像质量均有较大影响。透镜中心厚度的加工是否满足要求,需要高精度的测量设备对其进行测量。故此研制一款高精度、快速、简便、稳定性好的透镜中心厚度测量设备是十分必要的。为了能够快速,简便地测量透镜中心厚度,本文基于色差共焦原理研制了一款透镜中心厚度测量设备,它的测量范围广、测量精度高、测量时间短、测量方法简便且稳定性好。本文的主要研究工作如下:1.根据现有的透镜中心厚度测量设备的技术路线及发展趋势,选择使用色差共焦法对透镜中心厚度进行测量。本文详细地研究了色差共焦原理以及利用色差共焦原理对透镜中心厚度进行测量的机理,研究表明利用色差共焦法进行透镜中心厚度测量是一种可行的、简便的、快速的方法。2.完成了色差共焦系统出射光光谱带宽进行了研究,为色差共焦系统的设计提供科学的指导。研究表明:色差共焦系统像方数值孔径,共焦小孔尺寸,出射光光谱峰值波长等都会影响共焦小孔处出射光光谱带宽。3.根据测量原理以及测量需求,完成了设备设计指标的确定以及可行性分析。将该设备的最大测量值设计为30 mm左右,测量精度为±6μm以内。4.完成了色差共焦系统的设计及其子系统的设计和选择,其中包括光源、色差镜头、共焦小孔、分光系统等,为色差共焦系统的设计提供科学指导以及参考。5.设计了透镜中心定位方法,该方法能够快速、简便地找到透镜的顶点位置。大大地简便了调节被测透镜的光轴与色差镜头的光轴共线的过程。利用这种方法,可以在在很大程度上减少测量所需要的准备时间。6.编写了透镜中心厚度计算程序,并详细介绍了透镜中心厚度的计算方法,其中包括峰值波长的测量方法以及透镜的厚度的计算算法。7.利用研制出的设备,对一系列的标准厚度的透镜进行测量实验,实验结果表明该测量设备最大测量范围可达30 mm,精度为±5μm,测量时间小于2 s,适用于大批量透镜中心厚度检测。
[Abstract]:Lens is widely used, and the thickness of lens center is an important parameter of lens, which has great influence on the focal length of lens and the imaging quality of optical system. Therefore, it is necessary to develop a high precision, fast, simple and stable measuring equipment for measuring the thickness of lens center. It is easy to measure the thickness of lens center. Based on the color-aberration confocal principle, a device for measuring the thickness of lens center is developed in this paper. It has the advantages of wide measuring range, high measuring precision and short measuring time. The measurement method is simple and stable. The main research work of this paper is as follows: 1. According to the technical route and development trend of the existing lens center thickness measuring equipment. Color difference confocal method is chosen to measure the thickness of lens center. The principle of color difference confocal and the mechanism of measuring the thickness of lens center by color difference confocal principle are studied in detail in this paper. The results show that it is feasible, simple and fast to measure the thickness of lens center by using the chromatic confocal method. 2. The spectral bandwidth of the output light of the chromatic confocal system is studied. It provides scientific guidance for the design of color aberration confocal system. The research shows that the image square numerical aperture and the size of confocal hole of chromatic confocal system are obtained. The peak wavelength of the output light spectrum will affect the spectral bandwidth of the confocal aperture. 3. According to the measurement principle and measurement requirements. The design index and feasibility analysis of the equipment are completed, and the maximum measuring value of the equipment is designed to be about 30 mm. The measuring accuracy is within 卤6 渭 m. 4. The design of color difference confocal system and its sub-system are completed, including light source, chromatic lens, confocal aperture, light splitter system and so on. Provide scientific guidance for the design of color aberration confocal system and reference .5. design the lens center location method, this method can be rapid. The vertex position of the lens can be easily found. The process of adjusting the collinear between the optical axis of the measured lens and the optical axis of the chromatic aberration lens is greatly simplified. The preparation time required for measurement can be reduced to a great extent. 6. A program for calculating the thickness of the lens center is developed, and the calculation method of the thickness of the lens center is introduced in detail. Which includes the peak wavelength measurement method and lens thickness calculation algorithm .7.Using the developed equipment, a series of standard thickness lens measurement experiments are carried out. The experimental results show that the maximum measuring range is 30 mm, the accuracy is 卤5 渭 m, the measuring time is less than 2 s, and it is suitable for measuring the thickness of the lens center in large quantities.
【学位授予单位】：中国科学院研究生院(长春光学精密机械与物理研究所)
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TH74

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