大口径透镜多点柔性支撑结构设计与分析

发布时间：2018-01-30 22:44

本文关键词： 柔性支撑透镜支撑热变形自重变形有限元分析　出处：《光电工程》2015年05期 　论文类型：期刊论文

【摘要】：透镜面形精度是影响透射式光学系统性能的主要因素之一,支撑结构、自重和热载荷是引起透镜面形发生变化的三个主要原因。为了实现大口径透镜(Φ200 mm)的高面形精度,本文设计了一种新的基于多点柔性支撑的透镜支撑结构,通过有限元分析,给出该柔性支撑结构下自重和热载荷对透镜面形的影响。分析结果表明:重力作用下透镜上、下表面面形RMS值分别为6.78 nm和3.46 nm;热载荷作用下透镜上、下表面面形RMS值分别为8.30 nm和5.57 nm。由此得出,本文设计的多点柔性支撑结构可以有效减少自重和热载荷对大口径镜面面形的影响,满足透射式光学系统对透镜面形的精度要求(RMSλ/50,λ=632.8 nm)。
[Abstract]:The accuracy of lens profile is one of the main factors that affect the performance of transmission optical system, supporting structure. Gravity and thermal load are the three main reasons for the change of lens surface shape. In order to achieve the high profile accuracy of large aperture lens (桅 200 mm). In this paper, a new kind of lens supporting structure based on multi-point flexible support is designed and analyzed by finite element method. The effects of gravity and thermal load on the surface shape of the lens are given. The results show that the RMS values of the upper and lower surface of the lens are 6.78 nm and 3.46 nm respectively under the action of gravity. The RMS values of the upper and lower surface of the lens are 8.30 nm and 5.57 nm respectively under thermal loading. The multi-point flexible support structure designed in this paper can effectively reduce the influence of gravity and thermal load on the large aperture mirror shape, and meet the requirement of RMS 位 / 50 for the accuracy of transmission optical system. Lambda is 632.8 nm.
【作者单位】：中国科学院国家天文台长春人造卫星观测站;中国科学院长春光学精密机械与物理研究所;
【基金】：国家自然科学基金资助项目(41105014)
【分类号】：TH74
【正文快照】： 0引言透镜是透射式光学系统的关键光学器件,透镜的面形精度和安装精度是影响整个光学系统性能的关键因素。以成像光谱仪为例,随着对光学系统视场角、分辨力和像差等性能要求的提高,光学元件的口径越来越大,且对系统中单个透镜面形精度的要求也越来越高[1-4],因此,需设计合理的

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