基于SOI工艺的扭转式微机械扫描光栅设计及制作

发布时间：2018-02-06 06:34

本文关键词： 微扫描光栅 SOI工艺衍射光谱扫描角度　出处：《应用光学》2014年04期 　论文类型：期刊论文

【摘要】：为实现微型光谱仪在工程领域的广泛应用,研究了其核心器件——扭转式微机械扫描光栅的结构与制作方法。利用SOI工艺,设计一种无需启动电极的静电梳齿驱动结构,可以使扭转式微机械扫描光栅具有低频驱动、制作工艺简单、扫描范围广等优点。通过设计的制作工艺方法,研制出了能够初步满足性能要求的扭转式微机械扫描光栅样件。测试结果表明:该微扫描光栅在驱动电压为25V时最大转角可达到±4.8°,对应的光学扫描角为19.2°。
[Abstract]:In order to realize the wide application of microspectrometer in engineering field, the structure and fabrication method of torsional micro-mechanical scanning grating, its core device, are studied. The SOI process is used. A kind of electrostatic comb drive structure without starting electrode is designed, which can make the torsional micro-mechanical scanning grating have the advantages of low frequency drive, simple fabrication process, wide scanning range and so on. A torsional micro-mechanical scanning grating sample has been developed, which can meet the performance requirements. The test results show that the maximum rotation angle of the micro-scanning grating can reach 卤4.8 掳when the driving voltage is 25V. The corresponding optical scanning angle is 19.2 掳.
【作者单位】：中国空空导弹研究院;
【分类号】：TH744.1

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