波长轮换与相移扫描相结合的表面形貌测量系统

发布时间：2018-02-09 19:36

本文关键词： 表面形貌测量相移干涉波长轮换相移扫描光学显微干涉法　出处：《光学精密工程》2015年09期 　论文类型：期刊论文

【摘要】：用光学显微干涉法进行表面形貌测量时其深度测量范围的扩大和形貌测量精度的提高是一对矛盾。为此,本文设计出了一种基于波长轮换与相移扫描相结合的三波长表面形貌测量系统,并提出了一种基于椭圆拟合与相位差大小尺度相结合的相位提取与识别算法。将这种算法运用于多波长干涉图像的数据处理,有效地提高了形貌的整体测量精度,并拓展了深度测量范围。实验结果表明:在深度测量范围扩大近15倍的条件下,采用粗糙度国家基准校准的方波多刻线样板得到的表面粗糙度数据与校准数据的相对误差仅为4.12%,表明该系统在一定的深度范围内能够实现表面形貌的高精度测量。另外,针对该系统设计的多波长相位识别算法对环境噪声要求不高,可以支持系统的高噪声或在线测量。
[Abstract]:It is a contradiction between the extension of depth measurement range and the improvement of the precision of surface topography measurement by optical microscopic interferometry. In this paper, a three-wavelength surface topography measurement system based on wavelength rotation and phase shift scanning is designed. A phase extraction and recognition algorithm based on ellipse fitting and phase difference scale is proposed. The algorithm is applied to the data processing of multi-wavelength interferometric images, and the overall measurement accuracy of the topography is improved effectively. The experimental results show that the range of depth measurement is nearly 15 times larger. The relative error between the surface roughness data and the calibration data is only 4.12, which indicates that the system can achieve high precision measurement of surface topography in a certain depth range. The multi-wavelength phase recognition algorithm designed for the system does not require high ambient noise and can support high noise or on-line measurement of the system.
【作者单位】：湖北工业大学机械工程学院;湖北省现代制造质量工程重点实验室;
【基金】：国家自然科学基金资助项目(No.51275157,No.51175154,No.51275158)
【分类号】：TH741.3

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