一种粘滑驱动微操作系统的研究

发布时间：2018-02-26 19:36

本文关键词： 粘滑驱动残余振动前馈控制微操作　出处：《华南理工大学》2015年硕士论文　论文类型：学位论文

【摘要】：跨尺度精密定位技术是微纳操作领域中的关键技术。作为一种满足该技术要求的累积式驱动方法,粘滑驱动系统结构紧凑,驱动波形简单,具有理论与应用价值。本文设计了一种基于柔顺机构的粘滑驱动微操作系统,并以提高该系统驱动性能为目标。主要研究内容如下:首先,粘滑驱动的实现受到驱动波形、系统动态特性、接触面摩擦力变化等诸多因素的影响。为进行定量分析并实现对系统的控制,通过抽象物理参数建立了系统的动力学模型。经讨论,将驱动机构简化为二阶质量-弹簧-阻尼模型,接触面摩擦学模型选用Lu Gre模型。针对柔顺机构的特点,对高频驱动下系统的可靠性进行了分析,给出了驱动波形参数许用值与压电陶瓷预紧力的关系式。其次,为抑制系统残余振动以提高粘滑驱动性能,对点阻滤波器、输入整形器两种开环前馈控制方法进行了研究。通过绘制残余振动比与上升时间比曲线,分析对比了两种方法的鲁棒性与响应速度。最后,对粘滑驱动系统进行了仿真分析,并搭建粘滑驱动微操作实验平台进行实验研究。仿真分析了驱动信号参数、二阶系统参数、运动块质量及预压力参数对驱动速度的影响,并且对开环前馈控制方法抑振效果进行了对比分析。仿真分析和实验结果均验证了理论模型的正确性和开环控制方法抑制残余振动、改善驱动性能的有效性。实验表明,柔顺机构的振动现象是制约微操作系统驱动性能的主要原因。
[Abstract]:Cross-scale precise positioning technology is the key technology in the field of micro-nano operation. As a cumulative driving method to meet the requirements of this technology, the stick-slip driving system is compact in structure and simple in driving waveform. This paper designs a kind of stick-slip driving micro-operating system based on compliant mechanism, and aims at improving the driving performance of the system. The main research contents are as follows: first, the realization of stick-slip driver is driven by waveform. In order to make quantitative analysis and realize the control of the system, the dynamic model of the system is established by abstract physical parameters. The drive mechanism is simplified as a second-order mass-spring-damping model, and Lu Gre model is selected for the friction model of the contact surface. The reliability of the system under high frequency driving is analyzed according to the characteristics of the compliant mechanism. The relation between the allowable value of driving waveform parameters and the pretension force of piezoelectric ceramics is given. Secondly, in order to suppress the residual vibration of the system to improve the stick-slip driving performance, the point resistive filter is obtained. Two open loop feedforward control methods of input shaper are studied. By drawing the curve of residual vibration ratio and rising time ratio, the robustness and response speed of the two methods are analyzed and compared. Finally, the viscous slip driving system is simulated and analyzed. The effects of driving signal parameters, second-order system parameters, mass of moving blocks and pre-pressure parameters on the driving speed are simulated and analyzed. The simulation results and experimental results verify the correctness of the theoretical model and the effectiveness of the open-loop control method to suppress residual vibration and improve the driving performance. The vibration of compliant mechanism is the main reason to restrict the driving performance of micro operating system.
【学位授予单位】：华南理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TH703

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