基于频域分析的抗振移相干涉测量

发布时间：2018-03-11 03:15

本文选题：移相干涉术　切入点：确定性加工　出处：《光学精密工程》2015年01期 　论文类型：期刊论文

【摘要】：针对移相干涉测量中振动引起的移相误差和对比度变化,提出了一种从空间载波干涉图频谱中提取移相和对比度信息的方法。该方法通过分析载波干涉图频谱,从基带和边带中提取移相和对比度信息,运用最小二乘法补偿对比度变化并复原波前位相。最后采用构造平滑孔径函数对带有孔径的干涉图进行处理。数值仿真证明:提出的方法可以高精度检测移相量和对比度变化,能够有效补偿因对比度变化引起的位相复原误差。在频率为9Hz、幅度为0.5μm的简谐振动条件下实验验证了本文方法的实用性。结果显示:从受振动干扰的干涉图中复原平晶表面时,其复原误差PV值小于0.015波长。该方法无需硬件改动,有望为移相干涉测量应用于现场测量提供一种低成本的解决方法。
[Abstract]:In view of the phase shift error and contrast change caused by vibration in phase shift interferometry, a method of extracting phase shift and contrast information from the spectrum of spatial carrier interferogram is proposed, which is based on the analysis of the frequency spectrum of carrier interferogram. Phase shift and contrast information is extracted from the baseband and sideband, The contrast change is compensated by the least square method and the wavefront phase is restored. Finally, the interferogram with aperture is processed by constructing the smoothing aperture function. The numerical simulation shows that the proposed method can detect the phase shift and contrast change with high precision. The phase recovery error caused by contrast change can be compensated effectively. The practicability of this method is verified by experiments under the condition of simple harmonic vibration with frequency of 9 Hz and amplitude of 0.5 渭 m. The results show that when the flat crystal surface is restored from the interferogram disturbed by vibration, The recovery error PV value is less than 0.015 wavelength. This method does not need to be changed in hardware, and it is expected to provide a low-cost solution for the application of phase-shift interferometry in field measurement.
【作者单位】：中国工程物理研究院机械制造工艺研究所;
【基金】：国家科技重大专项资助项目(No.2013ZX04006011)
【分类号】：TH744.3

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