高精度瑞奇-康芒检测法研究及测试距离精度影响分析

发布时间：2018-04-14 05:02

本文选题：测量 + 瑞奇-康芒　；参考：《光学学报》2014年01期

【摘要】：为实现高精度瑞奇-康芒法检测,利用检测系统光瞳面与被测平面镜二者间的坐标转换关系,结合最小二乘法直接对测得的系统波像差进行恢复,通过两角度检测分离由光路调整引入的离焦误差,得到更为精准的平面镜面形。分析光路中测试距离对坐标转换关系以及瑞奇角求解精度的影响,根据仿真分析结果确定实验方案。实验中采用两角度检测,对测试波前进行恢复并分离系统调整误差后,最终得到被检平面镜面形,结果峰谷(PV)值为0.182λ、均方根(RMS)值为0.0101λ,对比干涉仪直接检测结果 PV值为0.229λ、RMS值为0.013λ,PV检测精度优于λ/20,RMS检测精度优于λ/100,实验结果证明了此种面形恢复方法的有效性以及测试距离精度分析理论的正确性,从而实现了瑞奇-康芒法高精度检测。
[Abstract]:In order to realize the high precision Raychi-Conmao method, the system wavefront aberration was recovered directly by using the coordinate transformation relationship between the pupil surface and the plane mirror, and the least square method was used to directly recover the measured wavefront aberration.A more accurate plane mirror can be obtained by detecting the defocus error caused by adjusting the optical path in two angles.The influence of measuring distance in optical path on coordinate conversion relation and precision of Ricky angle solution is analyzed. The experimental scheme is determined according to the simulation results.In the experiment, the two angle detection is used to recover the test wavefront and to separate the system adjustment error, and finally the plane mirror shape is obtained.Results the VV value of peak-valley is 0.182 位, the RMS value of root mean square is 0.0101 位, the PV value of direct detection by contrast interferometer is 0.229 位 / L RMS value 0.013 位 / L PV detection precision is better than 位 / 20 RMS detection precision is better than 位 / 100. The experimental results show the effectiveness of this method and the measurement accuracy.The correctness of the theory of precision analysis of trial distance,Thus, the high precision detection of Rich-Conmao method is realized.
【作者单位】：中国科学院长春光学精密机械与物理研究所;中国科学院大学;
【基金】：国家863计划(2012AA040503) 国家自然科学基金重点项目(11034007)
【分类号】：TH741

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