基于光强自标定移相算法检测光学面形

发布时间：2018-04-21 16:55

本文选题：菲佐干涉仪 + 波长移相　；参考：《光学精密工程》2014年08期

【摘要】：考虑菲佐型波长移相干涉仪中波长可调谐激光器光强与调节电压之间的关系会对相位计算精度造成影响,本文提出了一种基于光强自标定的波长移相算法。首先,分析了波长可调谐激光器调节电压与输出光强之间的关系,建立了数学模型;然后,依据最小二乘判据,推导出了波长移相干涉仪的光强自标定移相算法。最后,实施了仿真实验,通过计算机生成背景光强具有一定变化的12幅干涉图,利用所提出的算法进行了相位恢复。结果表明,提出的算法可以很好地免疫激光器的光强变化,实现高精度的相位恢复。对口径为100mm的平面镜的测量结果显示RMS为0.005λ,PV为0.073λ。与ZYGO干涉仪测量结果的比较显示,两次测量面形的偏差RMS为0.0014λ,PV为0.022λ。得到的结果证明了算法的可行性及在菲佐型波长移相干涉仪中的实用性。
[Abstract]:Considering that the relationship between the intensity of wavelength tunable laser and the adjusting voltage will affect the precision of phase calculation, a wavelength phase shift algorithm based on self-calibration of light intensity is proposed in this paper. Firstly, the relationship between the adjusting voltage and the output intensity of the wavelength tunable laser is analyzed, and the mathematical model is established, and then, based on the least square criterion, the self-calibrating phase shift algorithm of the wavelength phase-shifted interferometer is derived. Finally, the simulation experiment is carried out, and 12 interferograms with varying background intensity are generated by computer, and the phase recovery is carried out by using the proposed algorithm. The results show that the proposed algorithm can effectively immune the laser intensity change and achieve high precision phase recovery. The measurement results of plane mirror with 100mm aperture show that the RMS is 0.005 位 / PV 0.073 位. Compared with the measured results of ZYGO interferometer, the deviation of surface shape measured twice is 0.0014 位 and PV is 0.022 位. The results show the feasibility of the algorithm and its practicability in Fizzo wavelength phase shift interferometer.
【作者单位】：中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室;中国科学院大学;
【基金】：国家重大科技专项资助项目(No.2009X02205)
【分类号】：TH744.3

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