提升熔石英抗激光损伤性能的磁流变与HF刻蚀结合方法

发布时间：2018-04-24 12:23

本文选题：熔石英 + 磁流变抛光　；参考：《国防科技大学学报》2015年06期

【摘要】：为提升紫外熔石英元件抗激光损伤性能,针对传统加工方法在加工过程中产生的破碎性缺陷和污染性缺陷,提出使用磁流变抛光结合HF酸刻蚀的组合工艺提升紫外熔石英元件抗激光损伤性能的方法。磁流变抛光特有的剪切去除原理能够有效去除传统加工过程产生的破碎性缺陷,同时不产生新的破碎性缺陷。HF酸动态酸刻蚀能够有效减少加工过程中产生的金属元素污染。实验结果表明:经过组合工艺处理的熔石英样品,在7J/cm2·3ω激光通量辐照下损伤密度由0.2mm~~(-2)降至0.008mm~(-2),在8J/cm2·3ω激光通量辐照下损伤密度由1mm~(-2)降至0.1mm~(-2),其元件抗损伤性能提升显著。
[Abstract]:In order to improve the anti-laser damage performance of ultraviolet fused quartz elements, the crushing and polluting defects produced by traditional processing methods were studied. A method of improving the laser damage resistance of ultraviolet fused quartz elements by the combination of magneto-rheological polishing and HF acid etching is presented. The special shear removal principle of magnetorheological polishing (MRP) can effectively remove the broken defects produced in the traditional processing process, and at the same time, it can effectively reduce the metal element pollution in the processing process without producing a new crushing defect .HF acid dynamic acid etching can effectively reduce the metal element pollution in the processing process. The experimental results show that the damage density of fused quartz samples treated by combined process is reduced from 0.2mm to 0.008mm / L under 7J/cm2 _ 3 蠅 laser flux, and the damage density is decreased from 1mm / m ~ (-2) to 0.1mm ~ (-1) mm ~ (-2) under 8J/cm2 _ 3 蠅 laser flux. The damage resistance performance of the element is improved significantly.
【作者单位】：国防科技大学机电工程与自动化学院;超精密加工技术湖南省重点实验室;
【基金】：国家自然科学基金资助项目(5127552;91323302)
【分类号】：TH74

【相似文献】