大范围白光干涉光学轮廓仪结构设计

发布时间：2018-04-25 04:09

本文选题：白光干涉仪 + 垂直扫描　；参考：《华中科技大学》2015年硕士论文

【摘要】：白光干涉轮廓仪具有非接触、高精度特点,尤其适合结构性表面测量。针对诸如MEMS、微光学元件等结构性表面水平和垂直大范围测量需求,研究大范围白光干涉光学轮廓仪,具有重要实用意义。本文设计大范围白光干涉光学轮廓仪的垂直和水平扫描系统机械结构,主要研究内容与成果包括:1.针对MEMS、微光学等结构性表面微观形貌测量需求,在分析白光干涉垂直扫描表面形貌测量原理基础上,设计了大范围白光干涉光学轮廓仪的整体方案和系统架构。2.设计了粗精两级驱动的大范围高分辨垂直扫描定位系统。粗驱动部分由步进电机与滚珠丝杠组成,垂直扫描范围可达8mm,分辨率1μm。精驱动部分由压电陶瓷、柔性铰链组成,扫描范围大于20μm,分辨率1nm。并对柔性铰链、角度调节装置、仪器的固有频率特性等进行了ANSYS优化仿真设计。3.设计了一种大范围共面水平扫描二维工作台,具有结构紧凑,双向运动关系装调方便,保证良好的运行平面度和扫描定位精度。4.设计了光栅干涉垂直扫描位移计量系统,其结合光栅衍射偏振干涉,实现垂直扫描位移的大范围、高分辨计量。5.在前述基础上,建构了大范围白光干涉光学轮廓仪的垂直和水平扫描系统,配合显微干涉及图像获取与分析软件系统,进行了系统测试,取得了良好的性能验证。
[Abstract]:White-light interferometer is non-contact, high-precision, especially suitable for structural surface measurement. It is of great practical significance to study a large range of white light interference optical profilometer to meet the needs of structural surface horizontal and vertical measurement such as MEMS and micro optical elements. In this paper, the mechanical structure of the vertical and horizontal scanning system of a wide range of white light interferometer optical profilometer is designed. The main research contents and achievements include: 1. Based on the analysis of the principle of white light interference vertical scanning surface topography measurement, the overall scheme and system architecture of a wide range of white light interferometer optical profilometer are designed to meet the needs of MEMS, low light microscopy and other structural microtopography measurement. A wide range of high resolution vertical scanning positioning system with two-stage drive is designed. The coarse drive part is composed of stepping motor and ball screw. The vertical scanning range is up to 8 mm and the resolution is 1 渭 m. The fine drive part is composed of piezoelectric ceramic, flexure hinge, scanning range more than 20 渭 m, resolution 1 nm. The ANSYS simulation design of the flexure hinge, the angle adjusting device and the natural frequency characteristic of the instrument is also carried out. A two dimensional horizontal scanning worktable with a wide range of coplanes is designed, which has compact structure, convenient installation of bidirectional motion relationship, and good running flatness and scanning positioning accuracy .4. A grating interferometric vertical scanning displacement measurement system is designed, which combines the grating diffraction polarization interference to achieve a wide range of vertical scanning displacement, high resolution measurement. On the basis of the above, the vertical and horizontal scanning system of a wide range of white light interferometer optical profilometer is constructed. The system is tested and good performance verification is obtained with the help of the software system of microscopic interference and image acquisition and analysis.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TH744.3

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