高精度微光学加速度计静电力闭环系统研究

发布时间：2018-04-28 12:09

本文选题：MOEMS加速度计 + 静电力　；参考：《浙江大学》2016年硕士论文

【摘要】：传统微机械加速度计精度无法满足高精度领域的需求,而新兴的微光学加速度计精度有了较大提高,但是动态范围过小,限制了其应用范围,因此本文设计了一套基于MOEMS加速度计的闭环反馈控制方案,在保证高灵敏度的前提下尽量提高其动态范围。本文首先介绍了课题研究的MOEMS加速度计的开环系统结构和工作原理,然后给出了开环模式下的系统输出结果,和实验装置改进以前的开环实验结果对比得知系统灵敏度得到了较大的提高,横向串扰也到了有效的抑制。之后分析了开环系统灵敏度和动态范围的矛盾,并给出了MOEMS加速度计闭环结构的方案设计,阐明通过静电力实现闭环反馈控制,从而引出了电容式加速度计开环和闭环研究。本文对开环电容式加速度计的结构和静电力驱动进行了分析和仿真说明了结构的低通性和静电驱动的非稳性,然后通过simulink仿真得到开环系统的动态输出结果图；对闭环电容式加速度计进行了数学建模,得到其数学模型,并通过simulink仿真得到其动态输出结果,通过和开环系统对比得知闭环系统可以有效提高系统的动态范围和工作带宽。最后针对电容式加速度计闭环系统进行了分模块设计和Pspice仿真,通过仿真结果阐明静电力闭环反馈控制的可行性,为后期制板和实验打下基础,也为未来将该闭环模块移植到现有MOEMS系统中做铺垫。
[Abstract]:The precision of traditional micro-mechanical accelerometers can not meet the needs of high-precision fields, but the accuracy of the newly developed micro-mechanical accelerometers has been greatly improved, but the dynamic range is too small, which limits its application scope. Therefore, a closed-loop feedback control scheme based on MOEMS accelerometer is designed to improve its dynamic range with high sensitivity. In this paper, the structure and working principle of the open-loop system of MOEMS accelerometer studied in this paper are introduced, and the output results of the system in open-loop mode are given. Compared with the experimental results before the improvement of the experimental device, it is shown that the sensitivity of the system has been greatly improved, and the transverse crosstalk has been effectively suppressed. Then, the contradiction between sensitivity and dynamic range of open-loop system is analyzed, and the design of closed-loop structure of MOEMS accelerometer is given. The closed-loop feedback control is realized by static power, and the open-loop and closed-loop research of capacitive accelerometer is introduced. In this paper, the structure of open-loop capacitive accelerometer and electrostatic drive are analyzed and simulated. The low pass of the structure and the non-stability of electrostatic drive are illustrated. Then the dynamic output diagram of the open-loop system is obtained by simulink simulation. The mathematical model of closed loop capacitive accelerometer is established, and the dynamic output result is obtained by simulink simulation. By comparing with open loop system, it is shown that the closed loop system can effectively improve the dynamic range and working bandwidth of the system. Finally, the module design and Pspice simulation of capacitive accelerometer closed-loop system are carried out. Through the simulation results, the feasibility of closed-loop feedback control of hydrostatic power system is illustrated, which lays the foundation for the later stage board making and experiment. It will also pave the way for transplanting the closed-loop module to the existing MOEMS system in the future.
【学位授予单位】：浙江大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH824.4

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