硅微谐振式加速度计驱动电路参数优化

发布时间：2018-05-02 03:22

本文选题：硅微谐振式加速度计 + 闭环驱动　；参考：《光学精密工程》2014年06期

【摘要】：将遗传算法与低频模型相结合,提出了一种快捷的驱动电路设计方法,用于提高低功耗硅微谐振式加速度计模拟驱动电路的瞬态性能,并缩短设计周期。该方法通过对闭环驱动电路模型进行高低频解耦,提取闭环驱动电路的低频模型;将提取的低频模型与遗传算法相结合,给出完整的优化方法,得到了满足各项实际约束的最优电路参数。针对某型硅微谐振式加速度计,建立了SIMULINK低频仿真模型,根据实际情况制定了约束条件。应用该方法求出了系统启动速度最快的PI控制器的参数,并对其进行了实验验证。起振实验结果表明,采用优化参数可使超调量小于50%,相位误差小于5°,1%调节时间从优化前的0.42s减少到优化后的0.19s,实验与仿真误差小于5%。得到的结果证明提出的方法正确有效,具有可实施性。
[Abstract]:Combining genetic algorithm with low frequency model, a fast driving circuit design method is proposed to improve the transient performance of the analog drive circuit of low power silicon microresonant accelerometer and shorten the design period. By decoupling the closed-loop driving circuit model with high and low frequency, the low-frequency model of the closed-loop driving circuit is extracted, and a complete optimization method is given by combining the extracted low-frequency model with genetic algorithm. The optimal circuit parameters satisfying the practical constraints are obtained. The SIMULINK low frequency simulation model is established for a silicon micro resonant accelerometer and the constraint conditions are established according to the actual conditions. The parameters of Pi controller with the fastest startup speed are obtained by using this method and verified by experiments. The experimental results show that the overshoot is less than 50, the phase error is less than 5 掳and the adjusting time is reduced from 0.42s before optimization to 0.19s after optimization, and the error between experiment and simulation is less than 5s. The results show that the proposed method is correct and effective.
【作者单位】：南京理工大学MEMS惯性技术研究中心;
【基金】：国家863高技术研究发展计划资助项目(No.2011AA040402)
【分类号】：TH824.4

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