级联式平面抛物面型X射线组合折射透镜的设计与制作

发布时间：2018-05-04 22:01

本文选题：组合折射透镜 + X射线光学器件　；参考：《物理学报》2014年19期

【摘要】：X射线组合折射透镜(CRL)已逐步成为同步辐射光源下X射线聚焦光学器件的标准配件之一,它具有结构紧凑、易调节校准、适用光子能量范围大等优点.本文设计了一种级联式平面抛物面型CRL,它将N1个具有较大抛物面几何孔径(R0)的折射单元I与N2个具有较小抛物面顶点曲率半径(R)的折射单元II级联,以解决常规CRL设计过程中焦斑尺寸与透过率的矛盾.采用PMMA材料,利用LIGA技术制作了一组级联式平面抛物面型CRL,其中折射单元I的主要结构参数为N1=15,R1=200μm,2R01=564μm;折射单元II的主要结构参数为N2=20,R2=50μm,2R02=140μm.在上海光源同步辐射线束上,所制作的级联式平面抛物面型CRL实现了对初始光斑尺寸为200μm×100μm的入射X射线的一维聚焦,测试得到的焦距为1.052 m,横向焦斑尺寸为24.9μm@8 keV,透过率为2.19%.
[Abstract]:X-ray combined refraction lens (CRL) has gradually become one of the standard accessories of X-ray focusing optical devices under synchrotron radiation light source. It has the advantages of compact structure, easy to adjust and calibrate, and suitable for a wide range of photon energy. In this paper, a cascade plane paraboloid CRL is designed, which cascades N1 refraction elements with larger parabolic geometric aperture R _ 0) and N _ 2 refraction elements with smaller parabolic vertex curvature radius R _ 2. In order to solve the conflict between focal spot size and transmittance in conventional CRL design process. A series of cascaded planar paraboloid CRLs have been fabricated by using PMMA material, in which the main structural parameters of refraction unit I are N _ 1N _ (15) R _ (1) (200 渭 m) ~ (2) R _ (01) 564 渭 m, and the main structural parameters of refraction unit II are N _ (2) ~ (20) C ~ (2 +) ~ (50 渭 m) ~ (2) ~ (2) ~ (2) ~ (2) R _ (2140) 渭 m. On the synchrotron radiation line bundle of Shanghai light source, the cascaded planar paraboloid CRL can focus the incident X-ray with the initial size of 200 渭 m 脳 100 渭 m. The measured focal length is 1.052 m, the transverse focal spot size is 24.9 渭 m @ 8keV, and the transmittance is 2.19.
【作者单位】：浙江工业大学理学院;浙江工业大学光学工程研究所;中国科学院上海应用物理研究所;
【基金】：高等学校博士学科点专项科研基金(批准号:20133317110006) 国家国际科技合作项目(批准号:2012DFR10510) 上海光源用户课题(批准号:09sr0134)资助的课题~~
【分类号】：O434.1;TH74

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