一种低机械噪声弱耦合的微机电陀螺敏感结构

发布时间：2018-05-10 08:19

  本文选题：微机电陀螺 + 机械热噪声　； 参考：《中国惯性技术学报》2015年03期

【摘要】：研究了一种能够在大气压下达到较高性能的微机电陀螺敏感结构。设计了一种用于敏感垂直于结构平面方向的角速度的、驱动轴和检测轴相似的线振动微机电陀螺敏感结构。用U形梁隔离驱动器、敏感质量块和检测器以降低机械耦合,检测轴采用变面积式检测电容以降低阻尼。推导了振动速率陀螺的机械频率响应特性,分析了机械热噪声和在调谐及非调谐模式下检测电路噪声等效的角速度噪声,分析了梁的刚度矩阵和机械耦合特性,测试了结构的驱动-检测耦合频率响应。在大气压下陀螺检测轴品质因数达到66,机械热噪声为1.89((°)·h-1)/√Hz,理论耦合刚度比大于800。
[Abstract]:A sensitive structure of MEMS gyroscope with high performance at atmospheric pressure is studied. A linear vibration MEMS gyroscope sensitive structure, which is used to sensitive angular velocity perpendicular to the plane direction of the structure and similar to the drive axis and the detecting axis, is designed. In order to reduce mechanical coupling, U beam isolation actuator, sensitive mass block and detector are used to reduce mechanical coupling, and variable area detection capacitance is used to reduce damping. The mechanical frequency response characteristics of the vibration-rate gyroscope are derived. The mechanical thermal noise and the angular velocity noise equivalent to the noise of the detection circuit in the tuning and non-tuning modes are analyzed. The stiffness matrix and the mechanical coupling characteristics of the beam are analyzed. The drive-detection coupling frequency response of the structure was tested. Under atmospheric pressure, the quality factor of the gyro detection axis is 66, the mechanical thermal noise is 1.89 (掳) h-1 / hm ~ (-1) Hz. the theoretical coupling stiffness ratio is more than 800.
【作者单位】： 清华大学精密仪器系;
【基金】：装备预先研究项目(20114113013)
【分类号】：TH113.1;TH824.3
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本文编号：1868555