薄膜热电偶测温螺钉传感器的研制

发布时间：2018-05-15 02:01

  本文选题：传感器 + 薄膜热电偶　； 参考：《仪表技术与传感器》2015年02期

【摘要】：针对正常工况下的内燃机活塞表面温度变化迅速的情况,研制了一种便于安装的薄膜热电偶测温螺钉传感器。采用直流脉冲磁控溅射的方法将Ni Cr/Ni Si热电偶薄膜直接溅射沉积在与内燃机活塞同种材料的测温螺钉的端部,热电偶薄膜和测温螺钉之间采用相同的磁控溅射方法制备Al2O3绝缘薄膜,采用自行研制的薄膜热电偶静、动态标定系统对所研制的测温螺钉进行标定,结果表明所研制的测温螺钉传感器在50~400℃范围内具有良好的线性和热稳定性,其塞贝克系数为41.9μV/K,最大线性误差不超过0.9%。热接点厚度仅为2μm,其响应时间为47.5μs。可以满足曲轴转速为1 800 r/min的内燃机活塞表面瞬态温度测试的需求,为内燃机结构的优化改进,新产品的开发提供了有力的保障,为新型传感器技术的进步做出了有益的尝试。
[Abstract]:In view of the rapid change of piston surface temperature under normal working conditions, a thin film thermocouple sensor for measuring the temperature of screw is developed. The Ni Cr/Ni Si thermocouple film was deposited directly by DC pulse magnetron sputtering on the end of the temperature measuring screw of the same material as the piston of internal combustion engine. The Al2O3 insulating film was prepared by the same magnetron sputtering method between the thermocouple film and the thermometer screw. The thermocouple static and dynamic calibration system was used to calibrate the developed thermocouple screw. The results show that the developed sensor has good linearity and thermal stability in the range of 50,400 鈩，

本文编号：1890454