真空环境下基于TDLAS温度测量与校准的实验研究

发布时间：2018-05-17 03:44

  本文选题：真空 + 温度　； 参考：《真空科学与技术学报》2014年12期

【摘要】：可调谐二极管激光吸收光谱(TDLAS)技术可用于气体温度的高精度快速测量,但目前TDLAS技术研究一般集中在正压范围,真空环境下该技术的应用研究较少。本文利用波长调制法对TDLAS进行真空下温度测量的溯源性和误差进行了实验研究并进行不确定度分析。实验以一等标准铂电阻温度计作为标准,以高精度恒温槽作为温源,采用自研的真空下温度校准装置,选取C2H2分子6558 cm-1附近处谱线对进行真空下的温度测量。实验结果表明:在中低温范围内,采用C2H2作为分析气体,TDLAS测温具有良好的稳定性和灵敏度,同一等标准铂电阻的误差不超过±0.2℃,测量结果的扩展不确定度U=0.24℃,k=2。
[Abstract]:Tunable diode laser absorption spectroscopy (TDLAS) technique can be used to measure the gas temperature quickly and accurately, but at present, the research of TDLAS technology is generally focused on the positive pressure range, but the application of this technology in vacuum environment is less. In this paper, the traceability and error of TDLAS temperature measurement under vacuum are studied experimentally and the uncertainty is analyzed by wavelength modulation method. The first class standard platinum resistance thermometer is used as the standard, the high precision constant temperature tank is used as the temperature source, and the self-developed vacuum temperature calibration device is used to measure the temperature in vacuum by selecting the spectral line near 6558 cm-1 of C2H2 molecule. The experimental results show that in the range of medium and low temperature, the C2H2 as the analytical gas has good stability and sensitivity, the error of the same standard platinum resistance is not more than 卤0.2 鈩，

本文编号：1899785